Isicelo se-Amonia embonini ye-Semiconductor

I-Amonia (NH₃), njenge-reagent yamakhemikhali ebalulekile, inokusebenza okusabalele kuyo yonke imikhakha yezimboni ehlukahlukene, indima yayo ebaluleke kakhulu ekukhiqizeni ama-semiconductor. I-Amoniya idlala indima ebalulekile ezigabeni ezimbalwa zokukhiqizwa kwe-semiconductor, okuhlanganisa ukufakwa kwe-nitrides, ukufakwa kwe-ion kanye ne-doping, ukuhlanza, kanye nezinqubo zokufaka. Lesi sihloko sizocubungula ukusetshenziswa kwe-ammonia embonini ye-semiconductor, ihlaziya indima yayo ebalulekile ekuthuthukiseni ukusebenza kwedivayisi, ekwehliseni izindleko, kanye nokushayela okusha kwemboni, kuyilapho idingida izinselele ebhekene nazo kanye nezitayela zentuthuko zesikhathi esizayo.

1. Izakhiwo Eziyisisekelo kanye Nokuziphatha Kwekhemikhali kwe-Amonia

I-ammonia iyinhlanganisela eyenziwe nge-nitrogen ne-hydrogen, eyaziwa ngokuba ne-alkalinity eqinile futhi ivame ukutholakala ekukhiqizeni umanyolo we-nitrogen wezimboni. I-Amonia ikhona njengegesi ekamelweni lokushisa kodwa ingancibilika emazingeni okushisa aphansi, iyenze ibe umthombo wegesi osebenza kakhulu. Embonini ye-semiconductor, izakhiwo zamakhemikhali ze-ammonia ziyenza ingxenye ewumgogodla yezinqubo ezimbalwa ezibucayi, ikakhulukazi ku-chemical vapor deposition (CVD), ukufakwa kwe-ion, kanye nemisebenzi yokuhlanza/yokufaka.

Amangqamuzana e-ammonia angasabela ngezinsimbi ezihlukahlukene, i-silicon, nezinye izinto zokwakha ama-nitride noma ukuzenza. Lokhu kusabela akusizi nje kuphela ekwenzeni izinto zefilimu ezacile ezifiselekayo kodwa futhi kuthuthukisa izici zikagesi, ezishisayo, kanye nemishini yezinto zokwakha, ngaleyo ndlela kuthuthukiswe ubuchwepheshe be-semiconductor.

2. Izicelo ze-Amoniya Ekukhiqizeni I-Semiconductor

I-Amonia idlala indima ebalulekile ekukhiqizeni ama-semiconductor, ikakhulukazi kulezi zindawo ezilandelayo:

2.1 Ukubekwa Kwamafilimu E-Nitride Thin

Emkhiqizweni wesimanje we-semiconductor, amafilimu amancane e-nitride, njenge-silicon nitride (Si₃N₄), i-aluminium nitride (AlN), ne-titanium nitride (TiN), asetshenziswa kabanzi njengezendlalelo ezivikelayo, izendlalelo zokuhlukanisa zikagesi, noma izinto ezisetshenziswayo. Ngesikhathi sokufakwa kwalawa mafilimu e-nitride, i-ammonia isebenza njengomthombo we-nitrogen obalulekile.

I-Chemical vapor deposition (CVD) ingenye yezindlela ezivame kakhulu zokufakwa kwefilimu ye-nitride.I-Amoniyaisabela namagesi afana ne-silane (SiH₄) emazingeni okushisa aphezulu ukuze ibole futhi yakhe amafilimu e-silicon nitride. Impendulo imi kanje:

3SiH4+4NH3→Si3N4+12H2

Le nqubo iholela ekwakhekeni kongqimba olufanayo lwe-silicon nitride endaweni ecwecwana ye-silicon. I-Amoniya inikeza umthombo we-nitrogen ozinzile futhi inika amandla ukulawula okunembile kokusabela neminye imithombo yegesi ngaphansi kwezimo ezithile, ngaleyo ndlela ilawula ikhwalithi, ukujiya, nokufana kwefilimu.

Amafilimu e-Nitride anokuqina okuhle kakhulu kwe-thermal, ukufakwa kukagesi, nokumelana ne-oxidation, okuwenza abaluleke kakhulu ekwenziweni kwe-semiconductor. Asetshenziswa kakhulu kumasekethe ahlanganisiwe (ama-IC) njengezendlalelo zokuhlukanisa ama-electrode, namafasitela abonakalayo kumadivayisi we-optoelectronic.

2.2 Ukufakwa kwe-Ion kanye neDoping

I-Amoniyafuthi idlala indima ebalulekile enqubweni ye-doping yezinto zokwakha ze-semiconductor. I-Doping iyindlela ebalulekile esetshenziselwa ukulawula ukuqhutshwa kukagesi kwezinto zokwakha ekwenziweni kwamadivaysi e-semiconductor. I-ammonia, njengomthombo we-nitrogen osebenza kahle, ivame ukusetshenziswa ngokubambisana namanye amagesi (afana ne-phosphine PH₃ kanye ne-diborane B₂H₆) ukuze kufakwe i-nitrogen ezintweni ezifana ne-silicon ne-gallium arsenide (GaAs) ngokufakwa kwe-ion.

Isibonelo, i-nitrogen doping ingalungisa izakhiwo zikagesi ze-silicon ukuze kwakheke ama-semiconductors ohlobo lwe-N noma lwe-P. Phakathi nezinqubo ezisebenzayo ze-nitrogen doping, i-ammonia inikeza umthombo we-nitrogen ohlanzekile, oqinisekisa ukulawula okunembile kokugxila kwe-doping. Lokhu kubalulekile ekwenziweni okuncane kanye nokukhiqizwa kwamadivayisi asebenza kahle kakhulu ekukhiqizeni okuhlanganisiwe kwesilinganiso esikhulu (VLSI).

2.3 Ukuhlanza nokunamathisela

Izinqubo zokuhlanza kanye ne-etching zibalulekile ekuqinisekiseni izinga eliphezulu lamadivayisi ekwenziweni kwe-semiconductor. I-ammonia isetshenziswa kakhulu kulezi zinqubo, ikakhulukazi ekufakweni kwe-plasma nasekuhlanzweni kwamakhemikhali.

Ku-plasma etching, i-ammonia ingahlanganiswa namanye amagesi (afana ne-chlorine, i-Cl₂) ukusiza ukususa ukungcola okuphilayo, izendlalelo ze-oxide, nokungcola kwensimbi endaweni eyilucwecwe. Isibonelo, i-ammonia isabela ne-oxygen ukuze ikhiqize izinhlobo ze-oksijini ezisebenzayo (ezifana ne-O₃ ne-O₂), ezisusa ngempumelelo ama-oxide angaphezulu futhi ziqinisekise ukuzinza ezinqubweni ezilandelayo.

Ukwengeza, i-ammonia ingasebenza njenge-solvent ezinqubweni zokuhlanza, isiza ukususa izinsalela zokulandelela ezakhiwe ngenxa yokusabela kwamakhemikhali noma ukucubungula amaphutha, ngaleyo ndlela kugcinwe ukuhlanzeka okuphezulu kwe-wafer.

3. Izinzuzo ze-Amoniya embonini ye-Semiconductor

I-Amonia inikeza izinzuzo ezimbalwa ekukhiqizeni i-semiconductor, ikakhulukazi kulezi zindawo ezilandelayo:

3.1 Umthombo weNitrojeni osebenzayo

I-Amoniya iwumthombo we-nitrogen osebenzayo futhi omsulwa ohlinzeka ngokutholakala okuzinzile nokunembayo kwama-athomu e-nitrogen ukuze kufakwe amafilimu e-nitride nezinqubo ze-doping. Lokhu kubalulekile ekwakhiweni kwamadivayisi amancane nano-scale ekukhiqizeni ama-semiconductor. Ezimweni eziningi, i-ammonia iyasebenza kakhulu futhi iyalawuleka kunamanye amagesi omthombo we-nitrogen (njengegesi ye-nitrogen noma ama-nitrogen oxides).

3.2 Ukulawulwa Kwenqubo Okuhle Kakhulu

Ukuphinda kusebenze kwe-ammonia kuyivumela ukuthi ilawule ngokunembile amazinga okusabela kanye nogqinsi lwefilimu ezinqubweni ezihlukahlukene eziyinkimbinkimbi. Ngokulungisa izinga lokugeleza kwe-ammonia, izinga lokushisa, nesikhathi sokuphendula, kuyenzeka ukuthi ulawule ngokunembile ubukhulu, ukufana, kanye nezici zesakhiwo samafilimu, ngaleyo ndlela kuthuthukiswe ukusebenza kwamadivayisi.

3.3 Ukusebenza Kwezindleko Nokuvumelana Nemvelo

Uma kuqhathaniswa namanye amagesi omthombo we-nitrogen, i-ammonia inezindleko eziphansi uma kuqhathaniswa futhi isebenzisa kahle kakhulu i-nitrogen, okuyenza ibe nenzuzo enkulu ekukhiqizweni kwe-semiconductor enkulu. Ngaphezu kwalokho, ubuchwepheshe bokugaywa kabusha kwe-ammonia nokuphinda busetshenziswe buthuthuke kakhulu, okunomthelela ebunganeni bayo bemvelo.

4. Izinselele Zokuphepha Nezemvelo

Naphezu kwendima yayo ebalulekile ekukhiqizeni ama-semiconductor, i-ammonia iveza izingozi ezingaba khona. Emazingeni okushisa asekamelweni, i-ammonia iyigesi, futhi esimweni sayo esiwuketshezi, igqwala kakhulu futhi inobuthi, idinga izinyathelo zokuphepha eziqinile lapho isetshenziswa.

1. Isitoreji Nezokuthutha: I-Amoniya kufanele igcinwe emazingeni okushisa aphansi kanye nezingcindezi eziphezulu, kusetshenziswa iziqukathi ezikhethekile namapayipi ukuvimbela ukuvuza.
2. Ukuphepha Kokusebenza: Abasebenza emigqeni yokukhiqiza i-semiconductor badinga ukugqoka okokuvikela, njengezibuko, amagilavu, namamaski egesi, ukuvimbela ukuchayeka kwe-ammonia emzimbeni womuntu.
3. Ukwelashwa Kwegesi Yemfucuza: Ukusetshenziswa kwe-ammonia kungase kukhiqize amagesi emfucumfucu ayingozi, ngakho izinhlelo ezisebenzayo zokuhlanza igesi engcolile kufanele zibe sezindaweni zokuqinisekisa ukuthi ukukhishwa kwegesi kuyahlangabezana nezindinganiso zemvelo.

Njengoba izinqubo zokukhiqiza ama-semiconductor ziqhubeka nokuthuthuka kanye nesidingo sokukhula okuphezulu kokusebenza kwedivayisi, indima ye-ammonia embonini izoqhubeka nokukhula. Lokhu kuyiqiniso ikakhulukazi kumasekethe ahlanganisiwe anesilinganiso esiphezulu se-nano, ama-quantum computing chips, kanye nobuchwepheshe bokupakisha obuthuthukile. Ukwengeza, njengoba imithetho yezemvelo iba lukhuni, ukuthuthukiswa kokukhiqizwa okuluhlaza kanye nobuchwepheshe bokugaywa kabusha kwe-ammonia kuzoba yisici esibalulekile ekusaseni lale mboni.

Izinhlelo zokusebenza ze-Amoniya embonini ye-semiconductor zinikeza isisekelo esiqinile sokuthuthukiswa kwezinto zikagesi zesimanje. Iqhaza layo ekuthuthukiseni ukusebenza kahle kokukhiqiza, ekwehliseni izindleko zokukhiqiza, kanye nokushayela ukuqanjwa kabusha kwezobuchwepheshe ibalulekile. Njengoba ubuchwepheshe buthuthuka, ukusetshenziswa kwe-ammonia kuzoqhubeka nokukhula, kusize imboni ye-semiconductor ithuthukele ekusebenzeni kahle kakhulu nasekusimameni kwemvelo.

I-Amoniya, njenge-reagent yamakhemikhali ebalulekile, idlala indima ebalulekile ekwenziweni kwe-semiconductor. Kubaluleke kakhulu ekufakweni kwamafilimu e-nitride, i-doping, kanye nezinqubo zokuhlanza/zokunamathisela. Ngokuqhubeka okuqhubekayo kobuchwepheshe be-semiconductor, izicelo ze-ammonia zizokhula, zenza umnikelo obalulekile ekuthuthukisweni kwezobuchwepheshe kanye nokusiza imboni ye-semiconductor ukuthi iguquke ngendlela esebenza kahle futhi evumelana nemvelo.