Igesi yeHuazhong iye yazinikezela ekuphumezeni ubugcisa kunye nesayensi yezamashishini kwaye Irhasi ekhethekileyo imveliso. Kwilizwe lanamhlanje lobuchwepheshe, ngakumbi ngaphakathi I-Semiconductor ishishini, imfuno ye I-Ultra-subight ephezulu Igesi ayisiyo nje into yokhetho; Yimfuneko epheleleyo. Eli nqaku lihlala liye kwihlabathi elinqabileyo Uhlalutyo lokungena kuba Iigesi ezikhethekileyo ze-elektroniki. Siza kuphonononga ukuba kutheni incinci ukungcola Inokuba neziphumo ezinqabileyo, indlela esibufumana ngayo ezi zinto trace Ukungcola, kwaye kuthetha ukuthini amashishini. Ukuqonda Ukungcola kwegesi kunye neendlela zawo ukucocwa kunye nokufunyanwa, njenge ICP-NS, sisitshixo sokuqinisekisa ukuthembeka kunye nokusebenza kwale mihla i-elektroniki. Esi siqwenga sixabise ixesha lakho kuba inika umbono we-irider-incwir ngokugcina i-generment Ukucoceka kweegesi ze-elektroniki ezikhethekileyo, ilitye lesiseko le I-Semiconductor kwaye i-elektroniki amacandelo.

Zeziphi iigesi ze-elektroniki ze-elektroniki kwaye kutheni ubunyulu babo bubalulekile kwimveliso ye-semiconductoration?

Iigesi ezikhethekileyo ze-elektroniki, idla ngokubhekiswa kuyo Iigesi ze-elektroniki okanye I-Semiconductor Gases, ludidi olukhethekileyo lwe Iigesi eziPhezulu-eziPhezulu kwaye umxube wegesi Ngokweenjineli kwi-injiki yenkqubo ebandakanyekileyo ebandakanyekayo kwizinto ze-elektroniki. Cinga ngazo njengezixhobo ezingabonakaliyo zeminyaka yedijithali. Ezi Iigesi zisetyenziswa kwi-semicondcuctor I-Fibring ibandakanya uluhlu oluhlukeneyo, njenge-silane (i-Silane) yokufaka imizila ye-silicon, initrogen trifluoride (NF₃) yeQyala. Argon (I-AR) njengekhali le-intert, kunye neentlobo ezahlukeneyo i-gesing gases njenge-phosphine (PH₃) okanye i-Arsine (Ash₃) yokutshintsha iipropathi zombane ze I-Semiconductor izixhobo. Igama elithile "I-elektroniki"ngokwakho ibalaselisa isicelo sabo esilungiselelwe kunye nokuchaneka okuphezulu kokuqulunqwa kwabo. Ayisiyo yonke imihla Iigesi zemizi-mveliso; Inkcazo yabo ingayimfuneko kakhulu.

Eyona nto ibaluleke kakhulu kubo ubunyulu ayinakuba ngaphezulu, ngakumbi ngaphakathi Yenza i-Semiconductor. Iisekethe ezihlanganisiweyo zanamhlanje (i-ICS) inqaku lokuzibandakanya kunye neendlela ezihlala zincinci, zihlala zilinganiswa kwii-nanometers (i-billionhs yemitha). Kule SurisCopic Squdel, nokuba i-atom enye engafunekiyo-a ukungcola-Ican isebenza njenge-boulder kumjelo omncinci, ukuphazamisa ukuhamba kombane okanye kubangela isiphene sesakhiwo. Oku kunokukhokelela kwi-chip engalunganga, kwaye kumzi mveliso apho izigidi zee-chips ziveliswa kwi-wafer enye, imali yemali nomonakalo ohlawulayo ovela kubanzi ungcoliseko inokuba sekhulu. Ke, i Ukucoceka kweegesi ze-elektroniki ezikhethekileyo yintsika esisiseko apho iyonke I-elektroniki kunye ne-semicondcuctor ishishini ime. Nantoni na ukungcola inokuthoba intsebenzo yesixhobo, isivuno, kunye nokuthembeka, ukwenza ingqokelela Ucoceko lwegesi Ulawulo olufanelekileyo.

Kwigesi yaseHuazhong, siyaqonda ukuba abathengi bethu kwi Amashishini ase-semicondontries thembela kuthi ukubonelela ngeegesi ezidibana okanye zigqithile "ezintlanu" (99.999%) okanye "nkqu" neenzuzo ezintandathu "(99.99%)%)%. Oku kuthetha ukuba nayiphi na ukungcola Kufuneka ubekhona ekugxininiseni kuneenxalenye zezigidi ngokwezigidi (i-PPM) okanye iinxalenye kwibhiliyoni nganye (PPB). Ukufezekisa kunye nokuqinisekisa oko Ucoceko oluphezulu amanqanaba afuna i ukucocwa Iindlela zemfundo kunye ne, Uhlalutyo lokungena Iindlela. Ubukho besingalindelekanga ukungcola inokubonisa imiba kunye Iisilinda zegesi okanye i-chain yoNcedo, esenza ukuba kutshekiwe umgangatho okungapheliyo. Siqinisekisa bethu I-nitrogen cylinder Umzekelo, umzekelo, hlanganise nale migangatho chazela, njengoko i-nitrogen yirhasi yendawo ye-semiconductor.

Ingayenza njani i-microscopic trace ifilousings derail semiconductor meminector Ukuvelisa imigca?

Ngamanye amaxesha kunzima ukucinga ukuba incinci kangakanani, a ukungcola Ukulinganiswa kwinxalenye nganye yebhiliyoni (i-PPB) okanye iinxalenye zetriliyoni (i-PPT), inokubangela ezo ngxaki zibalulekileyo. Kodwa kwihlabathi le I-Semiconductor ukuvelisa, ezi microscopic ungcoliseko zii-villains eziphambili. Makhe siqwalasele inkqubo yesiqhelo ye-semicondcuction: ibandakanya izithuba, ngamanye amaxesha kumakhulu, amanyathelo acocekileyo anjenge-fiplays (ebeka phantsi iifilimu ezincinci), i-etching (isuse i-atom). Inqanaba ngalinye lixhomekeke kwindawo ebhalwe ngokuchanekileyo yekhemikhali, edla ngokusebenza okanye igcinwe ngu Iigesi ezikhethekileyo ze-elektroniki. Ukuba a igesi isetyenzisiwe Kwelinye lala manyathelo athwala engafunekiyo ukungcola, leyo ukungcola ingabandakanywa kwizinto ezibuthathaka ze I-Semiconductor isixhobo.

Njengokuba, Ukungcola kweMeticic Njengesodium, intsimbi, okanye ubhedu, nokuba kugxininiso lwe-Ultra-olusezantsi, inokutshintsha kakhulu iipropathi zombane zesilicon. Banokudala iindlela ezihlangeneyo ezingafunekiyo, ezikhokelela kwimijikelezo emifutshane, okanye besenza "imigibe" ephazamisa ukuhamba kwee-elektroni, ukucothisa ifowuni okanye ibangele ukuba iphumelele ngokupheleleyo. A ukungcola Inokuphazamisa ukuphendula kwekhemikhali ejolise kwinyathelo lenkqubo. Umzekelo, a ungcoliseko Kwigesi ye-etching inokubangela ukungaphantsi kwe-etching okanye i-etch-ot-etch, ukonakalisa iipateni ezichanekileyo kwi-wafer. Impembelelo ayisiyo nje kwiitshipsi ezizodwa; engachazwanga ukungcola Umcimbi unokukhokelela kwiibatch zonke zee-fafrs ezikhutshelweyo, ezikhokelela kwizigidi zeedola ezikwilahleko, ukulibaziseka, kunye nabafuna ukuhanjiswa kwezinto ezisemgangathweni. Oku kuphakamisa imfuno ebaluleke kakhulu yeqhinga tsalela umlinganiso wokungcola.

Umceli mngeni kukuba "inqanaba" elamkelekileyo kulo naliphi na ukungcola igcina incipha njengoko I-Semiconductor Iimpawu zesixhobo zincinci. Into eyamkelekileyo ukungcola Inqanaba leshumi elidlulileyo inokuba yintlekele ungcoliseko Namhlanje. Idrive ye-Tound ayina-mineathering ibeka uxinzelelo olukhulu kubavelisi begesi kunye neelebhu zokuhlalutya ukuphucula Ukuqulunqwa umda amandla. Nokuba amathafa Ukungcola, amabala amancinci othuli angabonakaliyo kwiliso elinqunu, angakuthintela ukukhanya kwefoto ye-Phototithography okanye enze iziphene zomzimba kumphezulu we-waffe. Ke ngoko, ukulawula onke amandla ukungcola -Ukuza igesi, i-metallic, okanye amathafa -Ibalulekile. I Uluhlu lokungcola Oko kunokubangela ukuba imiba inkulu, igxininisa imfuneko yokuphucula ngokubanzi Uhlalutyo lwegesi.

Ngowuphi owona msebenzi uqhelekileyo? Ukuchonga ukungcola kwiigesi ze-elektroniki.

Xa sithetha malunga ukungcola kwiigesi Yenzelwe i I-elektroniki kunye ne-semicondcuctor Icandelo, sijonga indawo eyahlukeneyo yabalinganiswa, nganye inamandla okubangela ingozi enkulu. Ezi ukungcola ukuze kufunyanwe inokuthi ihlulwe ngokwahlukeneyo ibe yi-Gaseous, i-metallic, kunye neefom zamathamsanqa. Ukuqonda ezi ngxaki uqhelekileyo linyathelo lokuqala elisebenzayo Uhlalutyo lokungena nolawulo. Okhethekileyo ukungcola okwangoku ingahluka ngokuxhomekeke kwigesi ngokwayo, indlela yayo yemveliso, yokugcina, kunye nokusiphatha.

Igesi ukungcola zezinye iigesi ezikhoyo kwi-pire Irhasi ekhethekileyo. Umzekelo, ngaphakathi Ucoceko oluphezulu I-nitrogen, igesi eqhelekileyo ukungcola Ingabandakanya ioksijini (o₂), ukufuma (i-H₂O), ikharbon diokside (Co₂), i-Co₂n), i-Coubbon Monoxide (CO), kunye ne-hydrocarbons (CHₓ). Ioksijini kunye nokufuma kakhulu kuyingxaki kakhulu njengoko besebenza kakhulu kwaye kungakhokelela kwi-oxidation engafunekiyo ye I-Semiconductor izixhobo okanye izixhobo zenkqubo. Nokuba kwi Irhasi ye-Inert njenge Argon, ezi zinokubakho kwinqanaba lokulandela umkhondo. Njengenkampani, sihlala sibona izicelo zohlalutyo lwe Uluhlu olubanzi lokungcola, kubandakanya ezi ntlobo zisebenzayo. Umzekelo, izakhono zethu zibandakanya ukuvelisa ubunzima Irhasi Iimveliso, apho kulawula icandelo ngalinye, kubandakanya i-GASOOOOO YOKWENZA ukungcola, yinto enkulu.

Ukungcola kweMeticic yenye inkxalabo ephambili. Ezi ziiatoms ezifana nesodium (na), i-potassium (k), i-calcium (ca), intsimbi (fe), i-fu), i-chcromium (cu), i-chromium (Al). Banokuvela kwizinto ezingafunekiyo, izixhobo zemveliso (njengemibhobho kunye ne-reactors), okanye ne Iisilinda zegesi ngokwabo ukuba ayinyangwa ngokufanelekileyo. Njengoko kuchaziwe, ezi ukungcola kwentsimbi inokufumana kakhulu ukusebenza kombane I-Semiconductor izixhobo. Ukuchonga ezi kwi-PPB okanye amanqanaba e-PPT kufuna iindlela ezinobuthathaka kuhlalutyo olunjengo-Plasma Mass Spectrometry (ICP-NS). Kufuneka siqwalasele amathafa into. Ezi zizinto ezincinci okanye amathafa amanzi anqunyanyisiweyo kwi Ukuhamba kwegesi. Banokubangela iziphene zomzimba kwi-wafs, ibhlokhi i-nozzles kwizixhobo, okanye zazise enye ungcoliseko. Ukuqulunqa iqhosha kususo lokususa iinkcukacha, kodwa ukubeka iliso kumanqanaba abo kukwayinxalenye yenxalenye ye- Umgangatho weGesi Inkqubo. Ezinye Iigesi ezikhethekileyo ze-elektroniki nazo Iigesi okanye Iigesi eziyityhefu. ukungcola Iprofayili ayiyenzi le ngozi.

I-ICP-Nks: Umgangatho weGolide wokufumana izinto ezingcolileyo kwi-semiconductor gases?

Xa kuziwa kwi Uhlalutyo lweMetricic Ukungcola ngaphakathi I-ultra-gesi gesi gesi gesi, Ngokudibeneyo i-plasma ye-plasma ye-plasma yePlasma, okanye ICP-NS, ithathwa ngokubanzi njengetekhnoloji ephambili. Yindlela enamandla yohlaluko enokufumana kwaye uqiniseke uluhlu olubanzi lwe ukungcola kwesimilo, amaxesha amaninzi ezantsi ukuya kumanqanaba asezantsi aqaqambileyo - cinga iinxalenye-git-trillion (i-PPT) okanye i-quadrillion nganye (PPQ) yezinto ezithile. Le mvakalelo ichanekile ukuba kutheni ICP-NS iye yaba yinto ebaluleke kakhulu kwi I-Semiconductor ishishini, apho sithethile, kwanakwabakho umzuzu Ukungcola kweMeticic inokuba yingozi Umgangatho wemveliso.

Ingaba kwenzeka njani ICP-NS sebenza umlingo wayo? Ngamaxesha alula, i isampulu yerhasi (okanye isisombululo esivela kwigesi) saziswa kwiplasma eshushu kakhulu, ebiqhele Argon. Eli Plasma, ukufikelela kubushushu abangama-6,000 ukuya kwi-10,000 ° 2 ° C, inamandla ngokwaneleyo ukuba ikhuphe iimolekyuli zerhasi kunye ne-iotom iatom ekhoyo, kubandakanya nayiphi na Ukungcola kweMeticic. Ezi ions zikhutshwe kwi-plasma kwaye zikhokelwa kwi-spectrometer enkulu. I-spectrometer enkulu isebenza njengecebo lokucoca ulwimi oluchanekileyo, ukwahlula ii-ions ngokusekwe kumyinge wawo ohlawulelweyo. A umcwangcisi Emva koko hlula ii-ions zesisindo ngasinye, usivumela ukuba sichonge ukuba zeziphi izinto ezikhoyo kwaye zeziphi inani. Amandla e ICP-NS ukuskena kwi-spectrium ebanzi ye Ukungcola kwe-metric kwiigesi ezikhethekileyo ngaxeshanye kuyenza isebenze kakuhle.

Ngelixa ICP-NS inamandla ngokungathethekiyo, ayikho ngaphandle kwemiceli mngeni yayo, ngakumbi xa ujongene nayo Iigesi zisetyenziswa kwi-semicondcuctor I-FOBREALY. Indlela enye eqhelekileyo kukuyibamba ukungcola Ukusuka kumthamo omkhulu wegesi kwiqokelelo ephakathi okanye ulwelo, oluhlalutyo nge ICP-NS. Nangona kunjalo, ngqo Inaliti ethe ngqo yegesi kwi ICP-NS Inkqubo iya isiqhela phambili kwizicelo ezithile, nangona ifuna amabala akhethekileyo. Ukukhetha indlela kuxhomekeke kwicandelo elithile Ukungcola kwegesi Umdla, igesi yematrix, kunye neyimfuneko Ukuqulunqwa umda. Kwigesi yaseHuazhong, sigcina imali kakhulu kwizixhobo zohlalutyo lobugcisa, kubandakanya ICP-NS Ukubanakho, kuba siyayazi loo nto ibonelela ngethemba Uhlalutyo lokungena Idatha ibalulekile kwintembelo yokuba abathengi bethu bathengi bethu Ucoceko oluphezulu nge-Elektroniki igesi. Ukuchaneka kwe ICP-NS inceda ekuqinisekiseni ukuba ubunyulu beegesi dibana neemfuno ezifunekayo Inqanaba le-elektroniki izixhobo.

Kutheni le nto ukungavunwa kwerhasi irhasi ayinakuphikiswa ukuba i-elektroniki kunye nemizi-mveliso ye-semicondcuctors?

Isidingo sokungavumi Ucoceko lwegesi kwi I-Electronikhi kunye neZiko le-semiconductors ayisiyo nje ngokukhetha; Yimfuneko esisiseko eqhutywa yi-physics kunye nezoqoqosho lwemveliso yanamhlanje. Njengoko I-Semiconductor Izixhobo zincipha ukuya kwinqanaba le-nanometer, imvakalelo yazo kulo naluphi na uhlobo lwe ungcoliseko I-Skyrokotyisi. A ukungcola Oko kusenokwenzeka ukuba bekungakhathalelwanga, izixhobo ezinkulu zinokubangela ukusilela okuthandekayo kwiitshipsi ezinqumlayo. Le mpembelelo ngqo ifuthe ngqo - ipesenti ye-chips elungileyo nge-wafer nganye-kwaye kwanehlelo elincinci kwisivuno linokutolika kwizigidi zeedola kwiRhafu elahlekileyo ye-A I-Semiconductor umvelisi.

Cinga ngoYilo oluntsonkothileyo lwe-microlfacedor yanamhlanje okanye i-chip yenkumbulo. Iqulethe iibhiliyoni zabahambi, ngamnye umntu omangalisayo wobunjineli obuncinci. Ukusebenza kwaba bantu bahambileyo kuxhomekeka kwiipropathi zombane ezichanekileyo ze I-Semiconductor Izixhobo ezisetyenzisiweyo, ezikhoyo, ezikhoyo, zichaphazeleka kakhulu ukungcola. Umzekelo, ezithile Ukungcola kweMeticic Unokwazisa amanqanaba amandla angafunekiyo kwi-Silicon Band Gabe, ekhokelela kwi-leakued ye-leakued okanye encitshisiweyo. Oku kuthetha ukuba icothise icothise, ilunge ngakumbi, okanye izixhobo ezingasebenzi kakuhle. Igesi ukungcola Njengeoksijini okanye umswakama kunokukhokelela ekumiselweni kwee-oxide ze-oxide ezingekho mthethweni, ukutshintsha iifilimu zefilimu okanye iipropathi zokujonga ulwazi kubaluleke kakhulu kumsebenzi wesixhobo. Iyonke Umgangatho weGesi ngqo kuguqulela Umgangatho wemveliso kunye nokuthembeka.

Ngapha koko, i I-Electronikhi kunye neZiko le-semiconductors zibonakaliswa ziinkqubo ezinzima kakhulu kwaye zixabiso eliphezulu. Enye I-Semiconductor Isityalo esifundwayo ("i-fab") inokuxabisa iibhiliyoni zeedola ukwakha kunye nokuxhobisa. I I-Gases isetyenzisiwe zibalulekile kwiindleko ezininzi zendleko zendleko. Ukuba a Irhasi ekhethekileyo ingcolisiwe nge ukungcola, ayichaphazeli nje i-wafs ephunyezwayo; Inokungcolisa izixhobo zokulungisa ezixabiso. Oku kunokukhokelela kwixesha elandisiweyo lokucoca kunye nokucela, ukongeza ezinye iishedyuli zemveliso-eyona ntlungu iphambili kumntu ofana ne-Shen, oxhomekeke ekuhlanganeni kwexesha. Ke, ukuqinisekisa i Ukucoceka kweegesi ze-elektroniki ezikhethekileyo ngokungqongqo Uhlalutyo lokungena sisicwangciso esibalulekileyo sokunciphisa umngcipheko kwi-chain yonikezo. Ukugxila kwi Iigesi eziPhakamileyo ayinathemba kuba izibonda ziphezulu kakhulu.

Yeyiphi imiceli mngeni esijongene nayo kuhlalutyo lokungcola kwengqondo kwiigesi ezikhethekileyo?

Ukuhlalutya Ukungcola kweMeticic ngaphakathi Iigesi ezikhethekileyo, ngakumbi ezo zisetyenziswe kwi I-Semiconductor Umzi mveliso, uzisa iseti yemiceli mngeni. Ubugqwetha obuphambili buvela kugxininiso olusezantsi kakhulu apho ezi ukungcola Inokuba yingxaki - ihlala ikwiinxalenye-kwi-bhiliyoni (i-PPB) okanye neenxalenye-ze-tpt-pert-pet-pert. Ukufumanisa kwaye kugxininisa ngokuchanekileyo imali enjalo ayifuneki kungekuphela kuphela izixhobo ezinolwazi lokuphikisana ICP-NS Kodwa ikwacoceka kakhulu i_indawo ezikwimeko zendlela kunye neeprotecool zesampula zokuphatha ngesandla ukuphepha ukwazisa ngaphandle ungcoliseko.

Olunye umngeni obalulekileyo yisampulu yentshayelelo. Ezininzi Iigesi ezikhethekileyo ezisetyenzisiweyo ngaphakathi i-elektroniki zisebenza kakhulu, zikhathazekile, okanye i-pyrophoric (i-contaadoolly emoyeni). Ngokukhuselekileyo nangokuphumeza ngokufanelekileyo igesi Kwisixhobo sohlalutyo njenge ICP-NS Ngaphandle kokutshintsha i isampulu yerhasi okanye ukungcolisa isixhobo kufuna amabala enkolo ekhethekileyo kunye neenkqubo zokuphatha. Umzekelo, ngokuthe ngqo kwi irhasi yotywala njenge-hydrogen chloride (i-HCL) kumgangatho ICP-NS Inkqubo inokwenzakalisa kakhulu. Ke ngoko, iindlela ezingathanga ngqo, ezinjengokungena kwembathisi (i-bubbling igesi ngolwelo ukubanjwa ukungcola) Okanye ukurhweba ngamathayile, kuhlala kuqeshwa. Nangona kunjalo, ezi ndlela zinokwazisa imithombo yazo ye ungcoliseko okanye uhlalutyi ilahleko ukuba akwenziwanga ngokugqibeleleyo. Ukhetho lwe Irhasi yothutho Kwisinyithi, ukuba iyafuneka, kufuneka ingabakala ubunyulu.

Omnye umngeni kukwenza "isiphumo seMatrix." I-bulk irhasi ngokwayo (E.G., Argon, initrogen, i-hydrogen) inokuphazamisa ukufunyanwa kwe trace Ukungcola. Umzekelo, ngaphakathi ICP-NS, iplasma yenziwa kwi-bulk irhasi inokwenza i-ion ye-polyatotomic enamanqanaba afanayo-ratiod-to-catitos njengeethagethi Ukungcola kweMeticic, ekhokelela kwi-postatives yobuxoki okanye ubungakanani obuchanekileyo. Uhlalutyi kufuneka basebenzise iindlela ezinje ngokungqubana / iiseli zokuphendula kwi ICP-NS okanye isisombululo esiphakamileyo se-shoctrometry yokwahlula ezi zinto zibonakalayo. Ngaphaya koko, imigangatho yokulinganisa esetyenziselwa ukuqaphela ukungcola kwentsimbi kufuneka ichaneke kakhulu kwaye icinyiwe, kwaye yonke inkqubo yohlalutyo kufuneka iqinisekiswe ukuqinisekisa ukuthembeka kwe Uhlalutyo lokungena iziphumo. Thina, njengomthengisi, sikwanexhala malunga nengqibelelo ye Iisilinda zegesi kunye namandla abo okufaka isandla Ukungcola kweMeticic ekuhambeni kwexesha, nto leyo efuna ulawulo oluqhubayo olusemgangathweni.

Ngaba ukusebenzisa isixhobo sokutshintshiselana ngegesi ukuphucula ukuchaneka kwendlela yokungcola kwe-Poll?

Ewe, Sebenzisa isixhobo sotshintshiselwano ngegesi Inokudlala indima ebalulekileyo ekwandiseni ukuchaneka kwe tsalela umlinganiso wokungcola, ngakumbi xa ujongene nomngeni irhasi imatriki okanye xa ijolise kwi-Ultra-ephantsi Ukufunyanwa kwemida. A Isixhobo sokutshintsha kwegesi, ngamanye amaxesha kubhekiswa kuyo njengenkqubo yokupheliswa kweMatrix, ngokuyintloko isebenza ngokususa i-bulk irhasi (Icandelo eliphambili le isampulu yerhasi) ngelixa ugxile kwi trace Ukungcola Umdla. Eli nyathelo langaphambi koxinzelelo lingaphucula kakhulu imvakalelo yeendlela zohlalutyo olulandelayo ICP-NS okanye I-chromatograph yegesi iinkqubo.

Umgaqo obangela uninzi Izixhobo zokutshintshiselana ngegesi ibandakanya i-membrane ye-semi-femmer okanye i-adsorption / yendlela yokuthabatha. Umzekelo, i-pilladium membrane ingasetyenziselwa ukususa i-hydrogen evela kwi umxube wegesi, vumela abanye ukungcola kwiigesi ukugxila kwaye kudlule kwi umcwangcisi. Ngokufanayo, izinto ezithile ze-adsorblent zinokutsala ezinye ukungcola Ukusuka ekuhambeni irhasi umjelo, onokuthi emva koko abe nengqondo emdaka kumthamo omncinci ococekileyo Irhasi yothutho yohlalutyo. Ngokunciphisa inani le-bulk irhasi Ukufikelela kwi umcwangcisi, ezi zixhobo zinciphise intembelo yeMatrix, ziseke ingxolo yengxolo engasemva, kwaye inyuse ngokufanelekileyo umlinganiso wengxolo yengxolo yengxolo yethagethi trace Ukungcola. Oku kunokukhokelela kwisezantsi Umda wokufunyanwa.

Izibonelelo ze Sebenzisa isixhobo sotshintshiselwano ngegesi babonakala ngakumbi xa behlalutya ukungcola kwi-elektroniki Iigesi ekunzima ukuziphatha ngokuthe ngqo okanye ezinokubangela ukuphazamiseka okukhulu kwizixhobo zohlalutyo. Umzekelo, xa uzama ukulinganisa ioksijini okanye umswakama ngokusebenza Irhasi ekhethekileyo, a Isixhobo sokutshintsha kwegesi inokwahlukana nale ukungcola kwi-blign engakumbi Irhasi yothutho njenge Argon okanye i-helium ngaphambi kokuba ifike kwi umcwangcisi. Oku akuphuculi kuphela ukuchaneka kodwa kunokukhusela kwakhona izinto ezibuthathaka zohlalutyo. Njengomvelisi we I-99.999% i-chalty 50l cylinder xonon igesi, siyaliqonda ixabiso lendlela enjalo yokuqinisekisa okhethekileyo ubunyulu inqabile kwaye Iigesi ezikhethekileyo. Iteknoloji ye-AIDS kwi-Exect Ukucocwa kwegesi kunye namanqanaba okuqinisekisa.

Ikhonkco elibalulekileyo: Uhlalutyo lokungena kwiigesi ezisetyenziswa ngokuthe ngqo kwi-semicondcucy.

I Igesi isetyenziswa ngokuthe ngqo kwi-semicondcucy yemveliso Ngaba ubomi bobomi benkqubo yokutsala. Oku kubandakanya kungekuphela nje I-Bulk Gases njenge-nitrogen kwaye Argon, kodwa noluhlu olubanzi lwe Iigesi ezikhethekileyo ze-elektroniki njenge Iigesi ze-epitaxial (E.G., uSilane, i-Dermane yokukhula kwekristale), i-etching yegesi (E.G., NF ₃, SF₆, CLT₂ yePatterning), I-ion yokufakwa kwegesi . Ngamnye waba Iigesi ziyafuneka, inqanaba kunye nohlobo lokwaleka ukungcola zichazwe ngobuqhetseba kuba nakuphi na ukuphambuka kunokuguqulela ngokuthe ngqo kwiziphene kwi I-Semiconductor i-wafer. Oku kwenza Uhlalutyo lokungena kwezi Inkqubo yegesi inyathelo elinengxaki yokulawula umgangatho.

Qwalasela i-propotition ye-selicon diokside yediyxide, i-inshurensi eqhelekileyo ehambileyo. Ukuba ioksijini Irhasi iyasetyenziswa Kule nkqubo iqulethe i-hydrocarbon ukungcola, ikharbon inokuthi ifakwe kunxweme lwe-oxide, ihlazo kwipropathi yakhe yokuthambisa kwaye inokubangela ukusilela kwecebo. Ngokufanayo, ukuba i-etching irhasi iqulethe into engalindelekanga ukungcola, inokutshintsha umgangatho okanye ukukhetha, okhokela kwiimpawu ezinkulu kakhulu, zincinci kakhulu, okanye zibunjwe ngokuchanekileyo. Nokuba ukungcola kwi Irhasi ye-Inert njenge I-Argon Sylinder yeRhasi isetyenziselwa ukuqhutywa komhlaba kungadluliselwa kumhlaba wesandla, echaphazela umgangatho wefilimu. Impembelelo ye ukungcola ihlala isebenza - ekhethekileyo, ethetha i ukungcola inyamezele inyathelo elinye kunokuba yinto ebaluleke kakhulu ungcoliseko kwelinye.

Eli nxibelelwano libalulekileyo linyanzelisa indlela ebanzi Uhlalutyo lokungena. Ayisiyo nje ngokujonga imveliso yokugqibela; Kubandakanya ukubeka esweni izinto ezingafunekiyo, kwimilambo yenkqubo, kunye nokugqibela irhasi amanqanaba okuhlanjululwa. Kuba I-Semiconductorty ikhethekileyo Iigesi, inkcazo ye Ukungcola kwi-semicondcuctor Izicelo zihlala ziqinile, zityhala imida yohlalutyo. Sisebenza ngokusondeleyo nabathengi bethu kwi I-Semiconductor kunye ne-elektroniki ifildi yokuqonda ikhethekileyo ukungcola imvakalelo yefani Iigesi kunye nomxube wegesi. Le ndlela yokusebenzisana inceda ukuqinisekisa ukuba Iigesi ezikhethekileyo Sinikezela ngokudibana neemfuno ezifunwayo zeenkqubo zabo eziphambili zemveliso. Umceli mngeni ulele ekufumaneni i Uluhlu olubanzi lokungcola amanqanaba anciphayo.

Ngaphandle kwelebhu: Iindlela ezilungileyo zokuphatha i-gemonity ye-semiconductor ye-semiconductor yokuthintela ungcoliseko.

Ukuqinisekisa i Ukucoceka kweegesi ze-elektroniki ezikhethekileyo ayipheli xa irhasi ishiya indawo yethu yemveliso. Ukugcina oko ubunyulu yonke indlela ukuya kwinqanaba lokusetyenziswa kwi I-Semiconductor I-fab ifuna ukuthathelwa ingqalelo ekusombululeni, ukugcinwa, kunye nokusasazwa. Nditsho elona liphezulu Igesi ye-chary inokubangcoliseka ukuba ingalawulwa ngokuchanekileyo. Kwigesi yeHuazhong, asijongi kuphela ekuveliseni Iigesi eziPhezulu-eziPhezulu Kodwa ikwacebisa abathengi bethu ngeendlela ezilungileyo zokuthintela ukugada ungcoliseko.

Eyona mikhwa iphambili ibandakanya:

• Ukukhetha icandelo: Onke amacandelo kwinkqubo yokuhambisa igesi-kubandakanya Iisilinda zegesi. I-Ultra-subight ephezulu (UhP) Inkonzo. Sebenzisa izinto ezingalunganga kunokukhokelela ekuphumeni kwe ukungcola okanye a Ukungcola kweMeticic Ukunikezela kwi Ukuhamba kwegesi.
• Ukunyaniseka kwenkqubo: Inkqubo yokuhambisa igesi kufuneka ivule. Nokuba ukuvuza nje okuncinci kunokuvumela i-tomosmospheric ungcoliseko njengeoksijini, ukufuma, kunye amathafa into yokufaka inkqubo, ukulalanisa Ucoceko lwegesi. Ukujonga rhoqo ukuvuza kubalulekile.
• IINKQUBO ZOKUGQIBELA: Iinkqubo ezifanelekileyo zokuhlamba zibaluleke kakhulu ngalo lonke ixesha unxibelelwano lwenziwe okanye i-cylinder itshintshiwe. Oku kubandakanya ukugungxula imigca nge Igesi ePuir Hight (njenge Argon okanye i-nitrogen) ukususa nayiphi na umoya obanjiweyo okanye ukungcola. Ukuhlambuluka okungapheliyo ngumthombo oqhelekileyo we ungcoliseko. Sisoloko sicebisa iiphaneli ezinqunyanyisiweyo zokuqinisekisa ukungqinelana.
• Izixhobo ezinikezelweyo: Sebenzisa abalawuli kunye nemigca ekhethekileyo igesi okanye iintsapho ze igesi inokuthintela ungcoliseko olunqamlezileyo. Oku kubaluleke kakhulu xa utshintshwa phakathi kwe Irhasi ye-Inert kunye nokusebenza okanye irhasi yotywala.
• Ukuphathwa kweCylinder: Iisilinda zegesi kufuneka iphathwe ngononophelo ukuthintela ukonakala. Kuya kufuneka bagcinwe kwiindawo ezichongiweyo, ezingena kakuhle, kunye "okokuqala, ngaphakathi, ukuqaphela" Ukusebenzisa Ukuqiniswa kwentambo kunye neoksijini Uhlalutyo kwiindawo ezibalulekileyo zinokunceda iliso nasiphi na i-ingere yesiqhelo yezi siqhelo ukungcola.

Abathengi njengoMark Shen, abathenga igesi ukuze baphinde benze izinto, basebenzise le ndlela yokuphatha ibalulekile ekugcineni Umgangatho wemveliso Bathembisa abathengi babo. Luxanduva ekwabelwana ngalo. Siqinisekisa bethu I-hydrogen cylinder Iimveliso, umzekelo, zizaliswa kwaye zigcinwa ukukhusela ukungcola I-Ingress, kodwa inkqubo yokuphela kwenkqubo idlala indima ebaluleke kakhulu. Umlo ochasene ukungcola ngumzamo oqhubekayo kwimveliso kwisicelo.

Ukujonga kwibhola yekristale: Ngawaphi intsha ukulindela ukuhlolwa kwengxolo kwiigesi zenqanaba le-elektroniki?

I-fuct engaphezulu ubunyulu ngaphakathi Inqanaba le-elektroniki yenqanaba le-elektroniki kunye nobuthathaka ngakumbi Ukucenwa kokungena Iindlela zohambo oluqhubekayo, oluqhutywa ngesantya sokukhululeka kwezinto ezintsha kwi I-Semiconductor ishishini. Njengeempawu zefowuni zincipha ngakumbi kwi-Nanometer ye-Nanometer kunye nezinto ezintsha kunye nokuyila (njenge-3d nand-yonke igalelo), ifuthe lokuthengisa trace Ukungcola iya kubhengezwa ngakumbi. Oku kuya kunyanzelisa ukuqhubela phambili kuzo zombini Ukucocwa kwegesi Itekhnoloji kunye Uhlalutyo lokungena amandla.

Singalindela iindlela ezininzi:

• Imida yokufunyanwa esezantsi: Iindlela zohlalutyo ezinje ICP-NS, I-chromatography-Mass Spectrometry (GC-MS), kunye ne-Cavity Cring-phantsi i-Spectrascopy (Cardroscopy) iya kuqhubeka nokuvela, ityhala Ukufunyanwa kwemida kubanzi Uluhlu lokungcola phantsi kumanqanaba e-PPT engatshatanga okanye kwi-ppq domain. Oku kuyakufuna izinto ezintsha kwimithombo yolwazi, abahlalutyo ezininzi, kwaye umcwangcisi Itekhnoloji.
• Ukubeka iliso kunye nexesha lokwenyani: Kukho imfuno ekhulayo yeenkqubo zokuhlalutya ezinokubeka esweni Ucoceko lwegesi Ngexesha lokwenyani, ngqo kwinqanaba lokusetyenziswa ngaphakathi I-Semiconductor I-Fab. Oku kuvumela ukufunyanwa kwangoko kwayo nayiphi na ungcoliseko Izehlo okanye impahla ukungcola Amanqanaba, enika inyathelo lokulungisa ngokukhawuleza kwaye anciphise ilahleko yemveliso. Iinzwa zangaphantsi kunye ne-chemometric ephezulu ye-chemometric idlala indima ephambili apha.
• Uhlalutyo lomxube wegesi ontsonkothileyo: Kwikamva I-Semiconductor Iinkqubo zinokubandakanya ubunzima ngakumbi umxube wegesi ngamacandelo amaninzi asebenzayo. Ukuhlalutya ukungcola Kumanyano olunjalo lucelomngeni luya kufuna iindlela ezintsha zokuhlalutya kunye nezixhobo zokutolika idatha. Amandla okulinganisa i ukungcola Kwicandelo elinye ngaphandle kokuphazanyiswa kwabanye kuya kuba yinto ebalulekileyo.
• Gxila kwi "Killer" Ukungcola: Uphando luya kuqhubeka nokuchonga ngokuthe ngqo Ukungcola kwi-semicondcuctor Ukuqhubekeka okunefuthe elikhulu lokusebenza kwintsebenzo yesixhobo okanye isivuno, nokuba ngamanqanaba asezantsi kakhulu. Iindlela zohlalutyo ziya kujoliswa ngakumbi kule "killer" ukungcola.
• Idatha yohlalutyo kunye ne-AI: Ixabiso elikhulu ledatha eveliswe ngokuphumelelayo Uhlalutyo lokungena Iinkqubo ziya kutshintshwa kusetyenziswa i-AI kunye nemfundo yomatshini yokuchonga iindlela, ziqikelela ukubakho ungcoliseko Imiba, kwaye yandisa Ukucocwa kwegesi iinkqubo. Oku kunokunceda ekuthinteleni umgangatho wokulawula kunokusombulula ingxaki.

Kwigesi yaseHuazhong, sizimisele ukuhlala ngaphambili kwezi zinto ziphuhlileyo. Ngokuqhubekayo sityala imali kuphando kunye nophuhliso, ukusebenzisana namahlakani eshishini kunye namaziko emfundo ukuqhubela phambili ngesayensi ye Igesi ePly imveliso kwaye Uhlalutyo lokungena. Kubathengi bethu, kubandakanya nezo zikumgangatho ofanelekileyo njengoMark Shen, oku kuthetha ukubonelelwa okuthembekileyo Iigesi ezikhethekileyo ze-elektroniki ihlangabezana neemfuno zokuvela kwe I-Electronikhi kunye neZiko le-semiconductors. Uluhlu lwethu lwe Helium, eyaziwa ngokuba zizicelo kwaye isetyenziswa kwizicelo ezizodwa, kunye nezibonelelo ezivela kula maphepha ohlalutyo abaphumeleleyo ukuqinisekisa ubungakanani ukungcola amanqanaba.

I-fetays eziphambili ekufuneka ikhumbule:

• Iigesi ezikhethekileyo ze-elektroniki zibalulekile Ukuvelisa i-semicondcuction, kwaye wabo ubunyulu ayinakuphikiswa.
• Nokuba trace Ukungcola, ilinganiswe kwi-PPB okanye i-PPT, inokubangela iziphene ezibalulekileyo kunye nelahleko ye-Veven I-Semiconductor izixhobo.
• Eqhelekileyo ukungcola kwiigesi Faka ezinye iigesi (njenge-O₂, h₂o), Ukungcola kweMeticic, kwaye amathafa into.
• ICP-NS Ngaba itekhnoloji yelimo yembombo yokufumana i Uluhlu olubanzi lokungcola, ngakumbi Ukungcola kweMeticic, kwinqanaba le-ultra-ephantsi.
• Ukugcina Ucoceko lwegesi ifuna ukuphathwa ngendlela eyiyo kunye nenkqubo yokugcina kwenkqubo evela kuyo isilinda igesi ukuya kwinqanaba lokusebenzisa ukukhusela ungcoliseko.
• Ikamva liya kubona nangaphantsi Ukufunyanwa kwemida, ukujonga okwenyani, kunye ne-ai-eqhutywa Uhlalutyo lokungena kuba Inqanaba le-elektroniki igesi.
• Ukulawula onke amandla ukungcola ibalulekile ekuqinisekiseni i Umgangatho wemveliso kunye nokuthembeka kwale mihla i-elektroniki.