Isicelo se-Ammonia kwiShishini leSemiconductor

I-Amoniya (NH₃), njengesixhobo esisebenza ngekhemikhali esibalulekileyo, sinezicelo ezixhaphakileyo kuzo zonke iinkalo zoshishino, indima yayo ibaluleke kakhulu kwimveliso yesemiconductor. I-ammonia idlala indima ebalulekileyo kumanqanaba aliqela emveliso ye-semiconductor, kubandakanywa ukufakwa kwe-nitrides, ukufakwa kwe-ion kunye ne-doping, ukucoca, kunye neenkqubo ze-etching. Eli nqaku liza kuphonononga ukusetyenziswa kwe-ammonia kwishishini le-semiconductor, lihlalutya indima yalo ebalulekileyo ekuphuculeni ukusebenza kwesixhobo, ukunciphisa iindleko, kunye nokuqhubela phambili ukuveliswa kweshishini, ngelixa lixubusha imingeni ejongene nayo kunye neendlela zophuhliso lwexesha elizayo.

1. IiPropati eziSisiseko kunye nokuziphatha kweMichiza ye-Amoniya

I-ammonia yikhompawundi eyenziwe yinitrogen kunye ne-hydrogen, eyaziwa ngokuba ne-alkalinity eyomeleleyo kwaye idla ngokufumaneka kwimveliso yesichumisi senitrogen. I-ammonia ikhona njengerhasi kwiqondo lobushushu begumbi kodwa inokunyibilika kumaqondo obushushu aphantsi, iyenze ibe ngumthombo werhasi osebenza kakhulu. Kwishishini le-semiconductor, iipropathi zeekhemikhali ze-ammonia zenza ukuba ibe yinxalenye ephambili yeenkqubo ezininzi ezibalulekileyo, ngakumbi kwi-chemical vapor deposition (CVD), ukufakelwa kwe-ion, kunye nokucoca / ukubethelwa kwemisebenzi.

Iimolekyuli ze-ammonia zinokusabela ngeentsimbi ezahlukeneyo, i-silicon, kunye nezinye izinto zokwenza i-nitrides okanye ukuzidopa. Ezi mpendulo azincedi kuphela ekwenzeni izinto zefilimu ezinqwenelekayo kodwa zikwaphucula umbane, i-thermal, kunye neempawu zoomatshini zemathiriyeli, ngaloo ndlela iqhubela phambili itekhnoloji ye-semiconductor.

2. Izicelo ze-Amoniya kwi-Semiconductor Manufacturing

I-Amoniya idlala indima ebalulekileyo kwimveliso ye-semiconductor, ngakumbi kwezi ndawo zilandelayo:

2.1 Ukubekwa kweNitride Thin Films

Kwimveliso yanamhlanje ye-semiconductor, iifilimu ezinqabileyo ze-nitride, ezifana ne-silicon nitride (Si₃N₄), i-aluminium nitride (i-AlN), kunye ne-titanium nitride (i-TiN), isetyenziswa ngokubanzi njengemigangatho yokukhusela, iileya zokuhlukanisa umbane, okanye izinto zokuqhuba. Ngexesha lokufakwa kwezi filimu ze-nitride, i-ammonia isebenza njengomthombo obalulekileyo wenitrogen.

I-Chemical vapor deposition (CVD) yenye yeendlela eziqhelekileyo zokubeka ifilimu ye-nitride.I-Amoniyaiphendula ngeegesi ezifana ne-silane (SiH₄) kumaqondo obushushu aphezulu ukubola kunye nokwenza iifilimu ze-silicon nitride. Impendulo yile ilandelayo:

3SiH4+4NH3→Si3N4+12H2

Le nkqubo iphumela ekwenziweni komgangatho ofanayo wesilicon nitride kumphezulu we-silicon wafer. I-ammonia ibonelela ngomthombo wenitrogen ozinzileyo kwaye yenza ulawulo oluchanekileyo lokusabela kunye neminye imithombo yegesi phantsi kweemeko ezithile, ngaloo ndlela ilawula umgangatho, ubukhulu, kunye nokufana kwefilimu.

Iifilimu ze-Nitride zinozinzo olubalaseleyo lobushushu, ukugqunywa kombane, kunye nokumelana ne-oxidation, nto leyo ezenza zibaluleke kakhulu kwimveliso ye-semiconductor. Zisetyenziswa ngokubanzi kwiisekethe ezidityanisiweyo (ICs) njengomaleko wokugquma, i-electrode isolation layers, kunye neefestile zamehlo kwizixhobo ze-optoelectronic.

2.2 Ukufakelwa kwe-Ion kunye neDoping

I-Amoniyanayo idlala indima ebalulekileyo kwinkqubo ye-doping yezinto ze-semiconductor. I-Doping yindlela ebalulekileyo esetyenziselwa ukulawula ukuqhutyelwa kombane kwemathiriyeli ekwenzeni izixhobo ze-semiconductor. I-Ammonia, njengomthombo we-nitrogen osebenzayo, isoloko isetyenziswa ngokubambisana nezinye iigesi (ezifana ne-phosphine PH₃ kunye ne-diborane B₂H₆) ukufaka i-nitrogen kwizinto ezifana ne-silicon kunye ne-gallium arsenide (GaAs) ngokufakelwa kwe-ion.

Ngokomzekelo, i-nitrogen doping inokulungelelanisa iimpawu zombane ze-silicon ukudala i-N-type okanye i-P-type semiconductors. Ngexesha leenkqubo ze-nitrogen doping ezisebenzayo, i-ammonia ibonelela ngomthombo we-nitrogen ococekileyo, oqinisekisa ulawulo oluchanekileyo malunga nokugxilwa kwe-doping. Oku kubaluleke kakhulu kwi-miniaturization kunye nokuveliswa kwezixhobo ezisebenza kakhulu kwimveliso yokuhlanganiswa okukhulu kakhulu (VLSI).

2.3 Ukucoca kunye nokuKritshwa

Iinkqubo zokucoca kunye ne-etching zingundoqo ekuqinisekiseni umgangatho wezixhobo kwimveliso ye-semiconductor. I-ammonia isetyenziswa kakhulu kwezi nkqubo, ngakumbi kwi-plasma etching kunye nokucoca imichiza.

Kwi-plasma etching, i-ammonia inokudibaniswa nezinye iigesi (ezifana neklorini, i-Cl₂) ukunceda ukususa ukungcola kwe-organic, i-oxide layers, kunye nokungcola kwetsimbi ukusuka kwi-wafer surface. Ngokomzekelo, i-ammonia isabela nge-oksijini ukuvelisa iintlobo ze-oksijini ezisebenzayo (ezifana ne-O₃ kunye ne-O₂), ezisusa ngokufanelekileyo i-oxides yomhlaba kunye nokuqinisekisa ukuzinza kwiinkqubo ezilandelayo.

Ukongezelela, i-ammonia inokusebenza njenge-solvent kwiinkqubo zokucoca, inceda ukususa i-residus ye-trace eyenziwe ngenxa ye-chemical reactions okanye i-process mishaps, ngaloo ndlela igcina ukucoceka okuphezulu kwe-wafer.

3. Izinto eziluncedo ze-Amoniya kuShishino lweSemiconductor

I-ammonia ibonelela ngeenzuzo ezininzi kwimveliso ye-semiconductor, ngakumbi kwezi ndawo zilandelayo:

3.1 Umthombo weNitrojeni osebenzayo

I-ammonia ngumthombo we-nitrogen osebenzayo kunye nococekileyo obonelela ngokuzinza kunye nobonelelo oluchanekileyo lwe-athomu ye-nitrogen yokubeka iifilimu ze-nitride kunye neenkqubo ze-doping. Oku kubalulekile ekwenziweni kwezixhobo ezincinci kunye ne-nano-scale kwimveliso ye-semiconductor. Kwiimeko ezininzi, i-ammonia iyasebenza kwaye iyalawuleka kunezinye iigesi zenitrogen (ezifana negesi yenitrogen okanye initrogen oxides).

3.2 Ulawulo lweNkqubo olugqwesileyo

I-reactivity ye-ammonia ivumela ukuba ilawule ngokuchanekileyo amazinga okuphendula kunye nobukhulu befilimu kwiinkqubo ezahlukeneyo ezinzima. Ngokulungelelanisa izinga lokuhamba kwe-ammonia, ubushushu, kunye nexesha lokuphendula, kunokwenzeka ukulawula ngokuchanekileyo ubukhulu, ukufana, kunye neempawu zesakhiwo seefilimu, ngaloo ndlela ukwandisa ukusebenza kwezixhobo.

3.3 Ukusebenza kakuhle kweendleko kunye nokuLungelana nokuSingqongileyo

Xa kuthelekiswa nezinye iigesi zomthombo wenitrogen, i-ammonia inexabiso eliphantsi ngokwentelekiso kwaye inokusetyenziswa ngokufanelekileyo kwenitrogen, iyenza ibe luncedo kakhulu kwimveliso yesemiconductor enkulu. Ngaphaya koko, ukurisayikilishwa kwe-ammonia nokusetyenziswa kwakhona kwetekhnoloji ziya zihambela phambili ngakumbi, zinegalelo kubume bayo bokusingqongileyo.

4. Imingeni yoKhuseleko kunye nokusiNgqongileyo

Ngaphandle kwendima yayo ebalulekileyo kwimveliso ye-semiconductor, i-ammonia ibonisa iingozi ezinokubakho. Kwiqondo lokushisa kwegumbi, i-ammonia yigesi, kwaye ikwimo yayo engamanzi, iyingozi kakhulu kwaye inetyhefu, ifuna amanyathelo angqongqo okhuseleko ngexesha lokusetyenziswa.

1. UGcino noThutho: I-Amoniya kufuneka igcinwe kumaqondo aphantsi kunye noxinzelelo oluphezulu, kusetyenziswa izitya ezikhethekileyo kunye nemibhobho yokukhusela ukuvuza.
2. Ukhuseleko lokuSebenza: Abaqhubi kwimigca yokuvelisa i-semiconductor kufuneka banxibe izixhobo zokukhusela, ezinjengeeglavu, iiglavu, kunye neemaski zegesi, ukuthintela ukuvezwa kwe-ammonia kumzimba womntu.
3. Unyango lweGesi yeNkunkuma: Ukusetyenziswa kwe-ammonia kunokuvelisa iigesi zenkunkuma ezinobungozi, ngoko ke iinkqubo ezifanelekileyo zokucocwa kwegesi yenkunkuma kufuneka zibekho ukuqinisekisa ukuba ukukhutshwa kuyahlangabezana nemigangatho yokusingqongileyo.

Njengoko iinkqubo zokwenziwa kwe-semiconductor ziqhubeka nokuhambela phambili kunye nemfuno yokusebenza okuphezulu kwesixhobo, indima ye-ammonia kushishino iya kuqhubeka nokukhula. Oku kuyinyani ngakumbi kwiisekethe ezidityanisiweyo ze-nano-scale ezichanekileyo, iitshiphusi zekhompyuter ze-quantum, kunye nobuchwepheshe bokupakisha obuphambili. Ukongeza, njengoko imimiselo yokusingqongileyo iya iba ngqongqo, uphuhliso lwemveliso eluhlaza kunye nobuchwepheshe bokurisayikilisha iammonia iya kuba yinto ebalulekileyo kwikamva loshishino.

Ukusetyenziswa kwe-ammonia kwishishini le-semiconductor libonelela ngesiseko esiluqilima sophuhliso lwee-elektroniki zanamhlanje. Indima yayo ekuphuculeni ukusebenza kakuhle kwemveliso, ukunciphisa iindleko zokwenziwa kwezinto, kunye nokuqhuba iteknoloji entsha ibalulekile. Njengoko iteknoloji iqhubela phambili, isicelo se-ammonia siya kuqhubeka sisanda, sincedisa ishishini le-semiconductor ukuba liguqukele ekusebenzeni kakuhle kunye nokuzinza kokusingqongileyo.

I-Amoniya, njenge-reagent yekhemikhali ebalulekileyo, idlala indima ebalulekileyo kwimveliso ye-semiconductor. Ibalulekile ekufakweni kweefilim ze-nitride, idoping, kunye nokucoca / iinkqubo ze-etching. Ngenkqubela phambili eqhubekayo yetekhnoloji ye-semiconductor, izicelo ze-ammonia zimiselwe ukukhula, zenza igalelo elibalulekileyo kwinkqubela phambili yezobuchwepheshe kunye nokunceda ishishini le-semiconductor livele ngendlela esebenzayo kunye neyokusingqongileyo.