Indasteri ea liphanele

Ka nts'etsopele ea theknoloji ea ho bonts'a liphanele tse bataletseng, bareki ba hloka likhase tse ikhethang le tsebo le boiphihlelo bo amanang le bona. Huazhong Gas e fana ka bareki ba pontšo ea phanele e bataletseng ka mefuta e mengata e fapaneng ea lisebelisoa tse khethehileng tsa khase, ho kenyeletsoa doping, deposition ea filimi, etching le mekhoa ea ho hloekisa kamore.

Lihlahisoa tse khothalelitsoeng indasteri ea hau

Silane

Khase ea silane ea mofuta oa elektroniki e sebelisoa haholo tlhahisong ea TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) indastering ea liphanele tsa ponts'o, le ho beha li-substrates tsa TFT kapa LTPS bakeng sa LCD.

Ammonia

Ha e kopantsoe le silane, e etsa silicon nitride layer ea a-Si transistors.

Motsoako oa khase

Tlhahiso ea LTPS le MOS transistors e ekelitse tšebeliso ea nitrous oxide. Ho latela pono ea tšebeliso le ts'ebeliso ea tlhahiso ea MO, N2O e fetile NF3 ho ba lisebelisoa tsa elektroniki tse sebelisoang haholo tlhahisong ea MO.

naetrojene trifluoride

NF3 ke lisebelisoa tsa elektronike tse sebelisoang ka ho fetisisa tlhahiso ea a-Si le LTPS 'me e sebelisoa haholo-holo ho hloekisa likamore tsa PECVD.