Kopo ea Ammonia ho Indasteri ea Semiconductor
Ammonia (NH₃), joalo ka sesebelisoa sa bohlokoa sa lik'hemik'hale, se na le ts'ebeliso e atileng mafapheng a fapaneng a indasteri, 'me karolo ea eona e le ea bohlokoa haholo tlhahisong ea li-semiconductor. Ammonia e bapala karolo ea bohlokoa methating e mengata ea tlhahiso ea semiconductor, ho kenyeletsoa ho beoa ha nitride, ho kengoa li-ion le doping, ho hloekisa le ho etsa li-etching. Sengoliloeng sena se tla shebisisa ts'ebeliso ea ammonia indastering ea semiconductor, ho sekaseka karolo ea eona ea bohlokoa ho ntlafatseng ts'ebetso ea sesebelisoa, ho fokotsa litšenyehelo, le ntlafatso ea indasteri, ha e ntse e bua ka liphephetso tseo e tobaneng le tsona le mekhoa ea ntlafatso ea nako e tlang.
1. Thepa ea Motheo le Boitšoaro ba Lik'hemik'hale tsa Ammonia
Ammonia ke motsoako o entsoeng ka naetrojene le hydrogen, e tsejoang ka alkalinity ea eona e matla 'me hangata e fumanoa tlhahisong ea manyolo a naetrojene a indasteri. Ammonia e teng e le khase mochesong oa kamore empa e ka tšeloa mocheso o tlase, e leng se etsang hore e be mohloli oa khase e sebetsang haholo. Indasteri ea semiconductor, thepa ea lik'hemik'hale ea ammonia e etsa hore e be karolo ea mantlha ea lits'ebetso tse 'maloa tsa bohlokoa, haholo ts'ebetsong ea mouoane oa lik'hemik'hale (CVD), ho kenngoa ha ion, le ts'ebetso ea ho hloekisa / etching.
Limolek'hule tsa ammonia li ka sebetsana le litšepe tse fapaneng, silicon, le lisebelisoa tse ling ho etsa nitride kapa ho li kopanya. Lits'ebetso tsena ha li thuse feela ho theheng thepa ea filimi e tšesaane e lakatsehang empa hape e ntlafatsa thepa ea motlakase, ea mocheso, le ea mochini oa thepa, ka tsela eo e nts'etsapele theknoloji ea semiconductor.
2. Likopo tsa Ammonia ho Semiconductor Manufacturing
Ammonia e bapala karolo ea bohlokoa tlhahisong ea li-semiconductor, haholo-holo libakeng tse latelang:
2.1 Ho beha lifilimi tsa Nitride Thin
Tlhahisong ea morao-rao ea semiconductor, lifilimi tse tšesaane tsa nitride, tse kang silicon nitride (Si₃N₄), aluminium nitride (AlN), le titanium nitride (TiN), li sebelisoa haholo e le likarolo tse sireletsang, likarolo tsa motlakase tse arohaneng, kapa lisebelisoa tse tsamaisang. Nakong ea tlhahiso ea lifilimi tsena tsa nitride, ammonia e sebetsa e le mohloli oa bohlokoa oa naetrojene.
Chemical vapor deposition (CVD) ke e 'ngoe ea mekhoa e atileng haholo ea ho beha filimi ea nitride.Ammoniae sebetsana le likhase tse kang silane (SiH₄) ka mocheso o phahameng ho senya le ho etsa lifilimi tsa silicon nitride. Karabo e tjena:
3SiH4+4NH3→Si3N4+12H2
Ts'ebetso ena e etsa hore ho thehoe lera le ts'oanang la silicon nitride holim'a silicon wafer surface. Ammonia e fana ka mohloli o tsitsitseng oa naetrojene 'me e etsa hore ho be le taolo e nepahetseng ea karabelo le mehloli e meng ea khase tlas'a maemo a itseng, kahoo e laola boleng, botenya, le ho tšoana ha filimi.
Lifilimi tsa Nitride li na le botsitso bo botle ba mocheso, ho kenya motlakase, le ho hanyetsa oxidation, e leng se etsang hore e be tsa bohlokoa haholo tlhahisong ea semiconductor. Li sebelisoa haholo lipotolohong tse kopantsoeng (li-IC) joalo ka likarolo tsa insulation, likarolo tsa ho itšehla thajana tsa elektrode, le lifensetere tsa optical lisebelisoa tsa optoelectronic.
2.2 Ho kenngoa ha Ion le Doping
Ammoniae boetse e phetha karolo ea bohlokoa ts'ebetsong ea doping ea lisebelisoa tsa semiconductor. Doping ke mokhoa oa bohlokoa o sebelisetsoang ho laola tsamaiso ea motlakase ea thepa ha ho etsoa lisebelisoa tsa semiconductor. Ammonia, e le mohloli o sebetsang oa naetrojene, hangata e sebelisoa hammoho le likhase tse ling (tse kang phosphine PH₃ le diborane B₂H₆) ho kenya naetrojene linthong tse kang silicon le gallium arsenide (GaAs) ka ho kenngoa ha ion.
Mohlala, doping ea naetrojene e ka fetola thepa ea motlakase ea silicon ho theha li-semiconductors tsa mofuta oa N kapa P. Nakong ea ts'ebetso e nepahetseng ea naetrojene ea doping, ammonia e fana ka mohloli o phahameng oa naetrojene, e netefatsang taolo e nepahetseng holim'a likhahla tsa doping. Sena se bohlokoa haholo bakeng sa ho etsa lintho tse nyane le ho hlahisa lisebelisoa tse sebetsang hantle haholo tlhahisong e kholo haholo ea ho kopanya (VLSI).
2.3 Ho hloekisa le ho Etching
Lits'ebetso tsa ho hloekisa le ho khabisa ke senotlolo sa ho netefatsa boleng ba lisebelisoa tsa ho etsa semiconductor. Ammonia e sebelisoa haholo lits'ebetsong tsena, haholo ho etching ea plasma le ho hloekisa lik'hemik'hale.
Ho etching ea plasma, ammonia e ka kopanngoa le likhase tse ling (tse kang chlorine, Cl₂) ho thusa ho tlosa litšila tse phelang, likarolo tsa oxide le litšila tsa tšepe ho tloha holim'a metsi. Ka mohlala, ammonia e sebetsana le oksijene ho hlahisa mefuta ea oksijene e sebetsang (e kang O₃ le O₂), e tlosang li-oxide tsa holim'a metsi ka katleho le ho netefatsa botsitso lits'ebetsong tse latelang.
Ho feta moo, ammonia e ka sebetsa e le mokelikeli lits'ebetsong tsa ho hloekisa, e thusa ho tlosa mesaletsa e entsoeng ka lebaka la karabelo ea lik'hemik'hale kapa ts'ebetso e mpe, ka hona ho boloka bohloeki bo phahameng ba sephaphatha.
3. Melemo ea Ammonia ho Indasteri ea Semiconductor
Ammonia e fana ka melemo e mengata tlhahisong ea semiconductor, haholo-holo libakeng tse latelang:
3.1 Mohloli o Sebetsang oa Nitrojene
Ammonia ke mohloli o sebetsang hantle le o hloekileng oa naetrojene o fanang ka phepelo e tsitsitseng le e nepahetseng ea liathomo tsa naetrojene bakeng sa ho beha lifilimi tsa nitride le lits'ebetso tsa doping. Sena se bohlokoa bakeng sa ho etsoa ha lisebelisoa tse nyane le nano-scale tlhahisong ea semiconductor. Maemong a mangata, ammonia e sebetsa haholoanyane le ho laoleha ho feta likhase tse ling tsa mohloli oa naetrojene (joaloka khase ea nitrogen kapa nitrogen oxides).
3.2 Taolo e Ntle ea Tsamaiso
Reactivity ea ammonia e e lumella ho laola ka mokhoa o nepahetseng litekanyetso tsa karabelo le botenya ba filimi ka mekhoa e mengata e rarahaneng. Ka ho fetola sekhahla sa phallo ea ammonia, mocheso le nako ea karabelo, hoa khoneha ho laola ka nepo botenya, ho ts'oana le sebopeho sa lifilimi, ka hona ho ntlafatsa ts'ebetso ea lisebelisoa.
3.3 Katleho ea Litšenyehelo le Botsoalle ba Tikoloho
Ha ho bapisoa le likhase tse ling tsa mohloli oa naetrojene, ammonia e batla e le theko e tlase mme e na le ts'ebeliso e phahameng ea naetrojene, e etsang hore e be molemo haholo tlhahisong e kholo ea semiconductor. Ho feta moo, litheknoloji tsa ho sebelisa ammonia hape le ho sebelisa hape li ntse li hatela pele, e leng se tlatsetsang molemong oa tikoloho.
4. Mathata a Polokeho le Tikoloho
Leha e na le karolo ea bohlokoa tlhahisong ea semiconductor, ammonia e hlahisa likotsi tse ka bang teng. Mocheso oa kamore, ammonia ke khase, 'me ka sebopeho sa eona sa mokelikeli, e senya haholo ebile e chefo, e hlokang mehato e tiileng ea tšireletso nakong ea tšebeliso.
- Polokelo le Lipalangoang: Ammonia e tlameha ho bolokoa mochesong o tlase le likhatello tse phahameng, ho sebelisoa lijana le liphaephe tse khethehileng ho thibela ho lutla.
- Tšireletseho ea Ts'ebetso: Basebelisi ba mehala ea tlhahiso ea semiconductor ba hloka ho roala lisebelisoa tsa ts'ireletso, joalo ka likhalase, liatlana, le limaske tsa khase, ho thibela ho pepeseha ha ammonia 'meleng oa motho.
- Phekolo ea Khase e Senyehileng: Tšebeliso ea ammonia e ka 'na ea hlahisa likhase tse kotsi tsa litšila, kahoo mekhoa e sebetsang hantle ea ho hloekisa khase ea litšila e tlameha ho ba teng ho netefatsa hore mesi e finyella litekanyetso tsa tikoloho.
Ha ts'ebetso ea tlhahiso ea semiconductor e ntse e tsoela pele le tlhoko ea ts'ebetso e phahameng ea lisebelisoa e ntse e eketseha, karolo ea ammonia indastering e tla tsoela pele ho hola. Sena ke 'nete ka ho khetheha lipotolohong tse kopaneng tsa nano-scale tse nepahetseng haholo, li-chips tsa quantum computing, le mahlale a tsoetseng pele a ho paka. Ho feta moo, ha melao ea tikoloho e ntse e ba thata, nts'etsopele ea tlhahiso e tala le theknoloji ea ho e sebelisa hape bakeng sa ammonia e tla fetoha ntlha ea bohlokoa bokamosong ba indasteri.
Lisebelisoa tsa Ammonia indastering ea semiconductor li fana ka motheo o tiileng bakeng sa nts'etsopele ea lisebelisoa tsa elektroniki tsa sejoale-joale. Karolo ea eona ea ho ntlafatsa ts'ebetso ea tlhahiso, ho fokotsa litšenyehelo tsa tlhahiso, le ho nts'etsapele boqapi ba mahlale ke ea bohlokoa haholo. Ha theknoloji e ntse e hatela pele, ts'ebeliso ea ammonia e tla tsoela pele ho hola, ho thusa indasteri ea semiconductor hore e fetohe ho fihlela katleho e kholo le ts'ireletso ea tikoloho.
Ammonia, joalo ka sesebelisoa sa bohlokoa sa lik'hemik'hale, se bapala karolo ea bohlokoa tlhahisong ea li-semiconductor. E bohlokoa bakeng sa ho beoa ha lifilimi tsa nitride, doping, le lits'ebetso tsa ho hloekisa / etching. Ka tsoelopele e tsoelang pele ea thekenoloji ea semiconductor, likopo tsa ammonia li ikemiselitse ho hola, ho fana ka litlatsetso tse kholo ntlafatsong ea theknoloji le ho thusa indasteri ea semiconductor hore e fetohe ka tsela e sebetsang hantle le e baballang tikoloho.
