Codsiga Ammonia ee Warshadaha Semiconductor

Ammonia (NH₃), sida reagent kiimikaad oo muhiim ah, waxay leedahay codsiyo baahsan oo ku baahsan qaybaha warshadaha kala duwan, iyada oo doorkeedu si gaar ah muhiim ugu yahay soosaarka semiconductor. Ammonia waxay door muhiim ah ka ciyaartaa dhowr marxaladood oo wax soo saarka semiconductor ah, oo ay ku jiraan dhigista nitrides, ion implantation iyo doping, nadiifinta, iyo hababka xoqidda. Maqaalkani wuxuu si qoto dheer u gelin doonaa codsiyada ammonia ee warshadaha semiconductor, falanqaynta doorkeeda muhiimka ah ee kor u qaadista waxqabadka qalabka, dhimista kharashyada, iyo hal-abuurka warshadaha wadista, iyada oo sidoo kale ka hadlaysa caqabadaha ay wajahayso iyo isbeddellada horumarinta mustaqbalka.

1. Guryaha Aasaasiga ah iyo Dhaqanka Kiimikada ee Ammonia

Ammonia waa iskudhis ka kooban nitrogen iyo haydrojiin, oo loo yaqaano alkalinitykeeda xooggan waxaana inta badan laga helaa soosaarka bacriminta nitrogen ee warshadaha. Ammonia waxay u jirtaa gaas ahaan heerkulka qolka laakiin waxaa lagu shubi karaa heerkul hoose, taasoo ka dhigaysa il gaas aad u firfircoon. Warshadaha semiconductor-ka, sifooyinka kiimikaad ee ammonia waxay ka dhigtaa qayb udub dhexaad u ah dhowr geedi socod oo muhiim ah, gaar ahaan kaydinta uumiga kiimikaad (CVD), ion implantation, iyo hawlaha nadiifinta/eejinta.

Unugyada ammonia waxay la falcelin karaan biro kala duwan, silikoon, iyo walxo kale si ay u sameeyaan nitrides ama si loo sameeyo. Dareen-celintani ma aha oo kaliya inay caawiso samaynta qalabka filimka khafiifka ah ee la doonayo, laakiin sidoo kale waxay hagaajinayaan korantada, kulaylka, iyo qalabka farsamada ee alaabta, taas oo horumarinaysa tignoolajiyada semiconductor.

2. Codsiyada Ammonia ee Soosaarka Semiconductor

Ammonia waxay door muhiim ah ka ciyaartaa wax soo saarka semiconductor, gaar ahaan meelaha soo socda:

2.1 Dhigista Filimada khafiifka ah ee Nitride

Soosaarka semiconductor-ka casriga ah, filimada khafiifka ah ee nitride, sida silikoon nitride (Si₃N₄), aluminium nitride (AlN), iyo titanium nitride (TiN), ayaa si weyn loogu isticmaalaa lakabyo ilaalin ah, lakabyo go'doomin koronto ah, ama agab wax dhaqaajiya. Inta lagu jiro meel dhigista filimadan nitride, ammonia waxay u adeegtaa sida il nitrogen oo muhiim ah.

Kaydinta uumiga kiimikada (CVD) waa mid ka mid ah hababka ugu badan ee dhigista filimka nitride.Ammoniala falgala gaasas sida silane (SiH₄) heerkul sare si uu u dumiyo oo u sameeyo aflaanta silikoon nitride Falcelintu waa sida soo socota:

3SiH4+4NH3→Si3N4+12H2

Habkani wuxuu keenayaa samaynta lakabka nitride silikoon lebbisan oo ku yaal dusha sare ee wafer silikoon. Ammonia waxay bixisaa ilo nitrogen ah oo deggan waxayna awood u siinaysaa in si sax ah loo xakameeyo falcelinta ilo gaas kale oo hoos yimaada xaalado gaar ah, taas oo lagu xakameynayo tayada, dhumucda, iyo isku midka ah ee filimka.

Aflaanta Nitride waxay leeyihiin xasillooni kuleyl oo heer sare ah, dahaarka korantada, iyo iska caabinta oksaydhka, taas oo ka dhigaysa mid aad muhiim ugu ah soosaarka semiconductor. Waxaa si weyn loogu isticmaalaa wareegyada isku dhafan (ICs) sida lakabyada dahaarka, lakabyada go'doominta korantada, iyo daaqadaha indhaha ee aaladaha optoelectronic.

2.2 Ion Implantation and Doping

Ammoniasidoo kale waxay door muhiim ah ka ciyaartaa habka doping ee walxaha semiconductor. Doping-ku waa farsamo muhiim ah oo loo isticmaalo in lagu xakameeyo dhaqdhaqaaqa korantada ee maaddooyinka samaynta aaladaha semiconductor. Ammonia, sida il nitrogen oo hufan, ayaa inta badan loo isticmaalaa iyada oo lala kaashanayo gaasaska kale (sida phosphine PH₃ iyo diborane B₂H₆) si loogu geliyo nitrogen walxaha sida silicon iyo gallium arsenide (GaAs) iyada oo loo marayo ion implantation.

Tusaale ahaan, doping nitrogen waxay hagaajin kartaa sifooyinka korantada ee silikoon si ay u abuurto nooca N ama nooca P-semiconductors. Inta lagu jiro geeddi-socodka wax-ku-oolnimada leh ee nitrogen-ka, ammonia waxay bixisaa ilo-nitrojiin oo saafi ah oo sarreeya, iyada oo hubinaysa xakamaynta saxda ah ee uruurinta doping-ka. Tani waxay muhiim u tahay yaraynta iyo soo saarista qalabyada waxqabadka sare leh ee wax soo saarka aadka u wayn (VLSI).

2.3 Nadiifinta iyo xoqidda

Nidaamyada nadiifinta iyo xoqidda ayaa fure u ah hubinta tayada dusha sare ee qalabka wax soo saarka semiconductor. Ammonia ayaa si weyn loogu isticmaalaa hababkan, gaar ahaan etching plasma iyo nadiifinta kiimikada.

In Plasma etching, ammonia waxaa lagu dari karaa gaas kale (sida chlorine, Cl₂) si ay u caawiyaan in ay ka saaraan wasakh organic, lakabyada oksaydh, iyo biraha wasakh ah ee dusha wafer. Tusaale ahaan, ammonia waxay la falgashaa ogsijiin si ay u dhaliso noocyada ogsijiinta falcelisa (sida O₃ iyo O₂), kuwaas oo si wax ku ool ah u saaraya oksaydhyada dusha sare oo hubiya xasilloonida hababka xiga.

Intaa waxaa dheer, ammonia waxay u dhaqmi kartaa sidii dareere ah hababka nadiifinta, ka caawinta inay ka saarto haraaga raadadka ee la sameeyay sababtoo ah falcelinta kiimikaad ama habka qallafsanaanta, sidaas darteed ilaalinta nadiifnimada sare ee waferka.

3. Faa'iidooyinka Ammonia ee Warshadaha Semiconductor

Ammonia waxay bixisaa faa'iidooyin dhowr ah xagga wax soo saarka semiconductor, gaar ahaan meelaha soo socda:

3.1 Isha Nitrogen ee Waxtarka leh

Ammonia waa il nayroojiin oo hufan oo saafi ah oo bixisa sahayda atamka nitrogen ka ee deggan oo sax ah si loo dhigo aflaanta nitride iyo hababka doping-ka. Tani waxay muhiim u tahay samaynta aaladaha yar-yar iyo nano-cabirka ee wax-soo-saarka semiconductor. Xaalado badan, ammonia aad ayay uga falcelis badan tahay oo waa la koontarooli karaa marka loo eego gaaska kale ee nitrogen (sida gaaska nitrogen ama nitrogen oxides).

3.2 Xakamaynta Habka Wanaagsan

Falcelinta ammonia waxay u oggolaaneysaa inay si sax ah u xakameyso heerarka falcelinta iyo dhumucda filimka ee habab adag oo kala duwan. Iyada oo la hagaajinayo heerka qulqulka ammonia, heerkulka, iyo waqtiga falcelinta, waxaa suurtagal ah in si sax ah loo xakameeyo dhumucda, lebbiska, iyo sifooyinka qaabdhismeedka filimada, sidaas darteed wanaajinta waxqabadka qalabka.

3.3 Waxtarka Kharashka iyo Saaxiibtinimada Deegaanka

Marka la barbardhigo gaaska kale ee ka soo baxa nitrogen, ammonia waa mid aad u hooseeya oo qiimaheedu yahay waxayna leedahay waxtarka isticmaalka nitrogen ee sarreeya, taasoo ka dhigaysa mid aad u faa'iido badan wax soo saarka semiconductor-ka ballaaran. Intaa waxaa dheer, tignoolajiyada dib-u-warshadaynta ammonia iyo dib-u-isticmaalka ayaa noqonaysa mid aad u horumarsan, taas oo gacan ka geysanaysa saaxiibtinimada deegaanka.

4. Badbaadada iyo caqabadaha deegaanka

Inkasta oo ay door muhiim ah ku leedahay wax soo saarka semiconductor, ammonia waxay soo bandhigaysaa khataraha iman kara. Heerkulka qolka, ammonia waa gaas, iyo qaabkeeda dareeraha ah, waa mid aad u daxalaysa oo sun ah, oo u baahan tallaabooyin adag oo badbaado ah inta lagu jiro isticmaalka.

1. Kaydinta iyo Gaadiidka: Ammonia waa in lagu kaydiyaa heerkul hoose iyo cadaadis sare, iyadoo la isticmaalayo weelal gaar ah iyo dhuumo si looga hortago in ay dillaacaan.
2. Badbaadada shaqada: Hawl-wadeennada khadadka wax-soo-saarka semiconductor waxay u baahan yihiin inay xidhaan qalabka ilaalinta, sida muraayadaha, galoofyada, iyo maaskaro gaaska, si looga hortago soo-gaadhista ammonia ee jidhka bini'aadamka.
3. Daaweynta Gaaska Qashinka: Isticmaalka ammonia waxa laga yaabaa inay soo saarto gaasas wasakh ah oo waxyeello leh, markaa habab wax ku ool ah oo lagu daweeyo gaaska wasakhda waa in la sameeyaa si loo hubiyo in qiiqu uu buuxiyo heerarka deegaanka.

Maaddaama hababka wax-soo-saarka semiconductor-ku ay sii socdaan oo ay baahida loo qabo waxqabadka aaladda sare ay korodho, doorka ammonia ee warshadaha ayaa sii wadi doona inay koraan. Tani waxay si gaar ah run ugu tahay wareegyada isku-dhafan ee cabbirka nano-sare ee saxda ah, chips-ka xisaabinta tirada, iyo tignoolajiyada baakadaha horumarsan. Intaa waxaa dheer, marka xeerarka deegaanku noqdaan kuwo adag, horumarinta wax soo saarka cagaarka ah iyo tignoolajiyada dib u warshadaynta ee ammonia waxay noqon doontaa arrin muhiim u ah mustaqbalka warshadaha.

Codsiyada Ammonia ee warshadaha semiconductor waxay siinayaan aasaas adag oo loogu talagalay horumarinta qalabka elektiroonigga ah ee casriga ah. Doorkeeda horumarinta hufnaanta wax-soo-saarka, dhimista kharashaadka wax-soo-saarka, iyo wadista hal-abuurka tignoolajiyada waa lama huraan. Marka ay tignoolajiyadu horumarto, dalabka ammonia wuxuu sii wadi doonaa inuu balaadhiyo, isagoo ka caawinaya warshadaha semiconductor-ka inay u koraan xagga waxtarka weyn iyo waaritaanka deegaanka.

Ammonia, sida reagent kiimikaad daruuri ah, ayaa door muhiim ah ka ciyaara wax soo saarka semiconductor. Waxay muhiim u tahay meel dhigista filimada nitride-ka, doping, iyo hababka nadiifinta / xoqidda. Iyada oo ay sii socoto horumarka tignoolajiyada semiconductor, codsiyada ammonia ayaa lagu wadaa inay koraan, iyagoo wax ku biirinaya horumarka tignoolajiyada iyo caawinta warshadaha semiconductor-ka inay u koraan jihada hufan oo saaxiibtinimo leh.