Panel industry

Nekuvandudzwa kweiyo flat panel kuratidza tekinoroji, vatengi vanoda mamwe magasi akakosha uye ane hukama ruzivo rwehunyanzvi uye ruzivo. Huazhong Gasi inopa flat panel inoratidzira vatengi vane dzakasiyana siyana dzakakosha gasi zvinhu, zvinosanganisira doping, firimu deposition, etching uye chamber yekuchenesa maapplications.

Zvigadzirwa zvinokurudzirwa zveindasitiri yako

Silane

Electronic giredhi silane gasi inonyanya kushandiswa mukugadzira TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) muindasitiri yekuratidzira, uye kuiswa kweTFT kana LTPS substrates yeLCDs.

Ammonia

Yakasanganiswa ne silane, inoumba iyo silicon nitride layer yea-Si transistors.

Gasmixture

Kugadzirwa kweLTPS uye MOS transistors kwakawedzera kushandiswa kwenitrous oxide. Kubva pamaonero ekushandisa uye kushandiswa mukugadzirwa kweMO, N2O yakapfuura NF3 kuita iyo inonyanya kushandiswa zvemagetsi mukugadzira MO.

nitrogen trifluoride

NF3 ndiyo inonyanya kushandiswa yemagetsi zvinhu mu-Si uye LTPS kuratidza kugadzirwa uye inonyanya kushandiswa kuchenesa makamuri ePECVD.