Ammonia Kushandisa muSemiconductor Indasitiri

Amoniya (NH₃), sechinhu chakakosha chemakemikari reagent, ine kushandiswa kwakapararira munzvimbo dzakasiyana siyana dzeindasitiri, nebasa rayo riri kunyanya kukosha mukugadzira semiconductor. Ammonia inoita basa rakakosha mumatanho akati wandei ekugadzirwa kwesemiconductor, kusanganisira kuiswa kwe nitrides, ion implantation uye doping, kuchenesa, uye etching maitiro. Ichi chinyorwa chichaongorora mashandisirwo eammonia muindasitiri yesemiconductor, ichiongorora basa rayo rakakura mukusimudzira mashandiro emudziyo, kudzikisira mitengo, uye kutyaira indasitiri yekuvandudza, uku ichikurukurawo matambudziko ainosangana nawo uye mafambiro ebudiriro mune ramangwana.

1. Basic Properties uye Chemical Behaviour yeammonia

Ammonia musanganiswa wakagadzirwa nenitrogen nehydrogen, inozivikanwa nekusimba kwayo alkalinity uye inowanzowanikwa muindasitiri nitrogen fetiraiza kugadzira. Ammonia iripo segasi patembiricha yemumba asi inogona kunyungudutswa patembiricha yakaderera, zvichiita kuti ive yakanyanya kuita gasi sosi. Muindasitiri yesemiconductor, makemikari zvimiro zveammonia zvinoita kuti ive chinhu chakakosha chemaitiro akati wandei akakosha, kunyanya mumakemikari vapor deposition (CVD), ion implantation, uye kuchenesa/etching mashandiro.

Ammonia mamorekuru anogona kuita nesimbi dzakasiyana-siyana, silicon, uye zvimwe zvinhu kugadzira nitrides kana kuti dope iwo. Aya maitirwo haangobatsiri chete mukugadzira izvo zvinodikanwa zvemufirimu zvinyoro asi zvakare kuvandudza magetsi, zvinopisa, uye zvemagetsi zvimiro zvezvishandiso, nekudaro kusimudzira tekinoroji yesemiconductor.

2. Zvikumbiro zveAmmonia muSemiconductor Manufacturing

Ammonia inoita basa rakakosha mukugadzira semiconductor, kunyanya munzvimbo dzinotevera:

2.1 Kuiswa kweNitride Thin Films

Mukugadzira semiconductor yemazuva ano, mafirimu matete nitride, akadai sesilicon nitride (Si₃N₄), aluminium nitride (AlN), uye titanium nitride (TiN), anoshandiswa zvakanyanya sezvikamu zvekudzivirira, magetsi ega ega, kana conductive zvinhu. Munguva yekuiswa kwemafirimu aya nitride, ammonia inoshanda seyakakosha nitrogen sosi.

Chemical vapor deposition (CVD) ndiyo imwe yedzakajairika nzira dzenitride firimu deposition.Ammoniainopindirana nemagasi akadai se silane (SiH₄) pakupisa kwepamusoro kuti iparadze uye igadzire mafirimu esilicon nitride. Mhinduro yacho ndeiyi:

3SiH4+4NH3→Si3N4+12H2

Izvi zvinoguma nekuumbwa kweiyo yunifomu yesilicon nitride layer pane iyo silicon wafer pamusoro. Ammonia inopa yakagadzikana nitrogen sosi uye inogonesa kunyatso kudzora kwekuita nemamwe magasi masosi pasi pemamiriro chaiwo, nekudaro kutonga kunaka, ukobvu, uye kufanana kwefirimu.

Mafirimu eNitride ane kugadzikana kwakanyanya kwemafuta, kuvharwa kwemagetsi, uye oxidation kuramba, zvichiita kuti anyanyokosha mukugadzira semiconductor. Iwo anoshandiswa zvakanyanya mumasekete akabatanidzwa (ICs) sematanho ekudzivirira, electrode isolation layers, uye mahwindo ekuona mune optoelectronic zvishandiso.

2.2 Ion Kudyarwa uye Doping

Ammoniainoitawo basa rakakosha mukuita doping yezvigadzirwa zve semiconductor. Doping inzira yakakosha inoshandiswa kudzora kufambiswa kwemagetsi kwezvinhu mukugadzirwa kwemidziyo yesemiconductor. Ammonia, seyakanaka nitrogen sosi, inowanzoshandiswa pamwe chete nemamwe magasi (akadai se phosphine PH₃ uye diborane B₂H₆) kuisa nitrogen muzvinhu zvakadai sesilicon uye gallium arsenide (GaAs) kuburikidza neion implantation.

Semuenzaniso, nitrogen doping inogona kugadzirisa magetsi esilicon kugadzira N-mhando kana P-mhando semiconductors. Munguva inoshanda nitrogen doping maitiro, ammonia inopa yakakwira-kuchena nitrogen sosi, kuve nechokwadi chekutonga kwakaringana pamusoro pekuisa doping. Izvi zvakakosha kune iyo miniaturization uye kugadzirwa kwepamusoro-inoshanda michina mukugadzira-yakakura-chikero kusanganisa (VLSI) kugadzira.

2.3 Kuchenesa uye kuseta

Kuchenesa uye etching maitiro akakosha pakuve nechokwadi chepamusoro mhando yemidziyo mukugadzira semiconductor. Ammonia inoshandiswa zvakanyanya mukuita izvi, kunyanya muplasma etching uye kuchenesa makemikari.

Mune plasma etching, ammonia inogona kusanganiswa nemamwe magasi (akadai seklorini, Cl₂) kubatsira kubvisa organic zvinosvibisa, oxide layer, uye tsvina yesimbi kubva pawafer pamusoro. Semuenzaniso, ammonia inopindirana neokisijeni kuti ibudise reactive okisijeni marudzi (akadai seO₃ uye O₂), ayo anobvisa zvinobudirira maokisi epamusoro uye anovimbisa kugadzikana mune zvinotevera maitiro.

Pamusoro pezvo, ammonia inogona kuita seanonyungudutsa mukuchenesa maitiro, ichibatsira kubvisa zvisaririra zvakaumbwa nekuda kwekuchinja kwemakemikari kana kuita mishaps, nekudaro kuchengetedza kuchena kwepamusoro kwechingwa.

3. Zvakanakira Ammonia muSemiconductor Indasitiri

Ammonia inopa akawanda mabhenefiti mukugadzira semiconductor, kunyanya munzvimbo dzinotevera:

3.1 Inoshanda Nitrogen Source

Ammonia inzvimbo inoshanda uye yakachena nitrogen sosi inopa yakagadzikana uye chaiyo maatomu enitrogen ekuiswa kwenitride mafirimu uye doping maitiro. Izvi zvakakosha pakugadzira michina midiki uye nano-scale mukugadzira semiconductor. Muzviitiko zvakawanda, ammonia inonyanya kushandiswa uye inodzoreka kupfuura mamwe magasi enitrogen source (akadai senitrogen gasi kana nitrogen oxides).

3.2 Yakanakisa Maitiro Kudzora

Iyo reactivity yeammonia inobvumira kuti inyatso kudzora maitiro ekuita uye ukobvu hwefirimu mune dzakasiyana siyana dzakaoma maitiro. Nekugadzirisa kuyerera kweammonia, tembiricha, uye nguva yekuita, zvinokwanisika kunyatso kudzora ukobvu, kufanana, uye hunhu hwemafirimu, nokudaro uchigonesa kushanda kwemidziyo.

3.3 Mutengo-Kubudirira uye Hushamwari Hwezvakatipoteredza

Kana ichienzaniswa nemamwe magasi enitrogen sosi, ammonia ine mutengo wakaderera uye ine yakakwira nitrogen mashandisiro ekushandisa, zvichiita kuti ibatsire zvakanyanya muhukuru-hukuru semiconductor kugadzirwa. Uyezve, ammonia kudzokorodza uye kushandisa zvakare matekinoroji ari kuwedzera kufambira mberi, zvichipa hushamwari hwayo kwezvakatipoteredza.

4. Kuchengetedza uye Matambudziko Ezvakatipoteredza

Pasinei nebasa rayo rinokosha mukugadzira semiconductor, ammonia inopa njodzi dzinogona kuitika. Patembiricha yemumba, ammonia igasi, uye muchimiro chayo chemvura, inoparadza zvakanyanya uye ine muchetura, inoda matanho akasimba ekuchengetedza panguva yekushandiswa.

1. Kuchengeta uye Kutakura: Ammonia inofanira kuchengetwa patembiricha yakaderera uye kumanikidzwa kukuru, uchishandisa midziyo yakasarudzika uye mapaipi kudzivirira kudonha.
2. Operational Safety: Vashandisi mumitsara yekugadzira semiconductor vanofanirwa kupfeka midziyo yekudzivirira, senge magirazi, magirovhosi, uye masiki egasi, kudzivirira kuratidzwa kweammonia kumuviri wemunhu.
3. Waste Gasi Kurapa+

Sezvo maitiro ekugadzira semiconductor achiramba achifambira mberi uye kudiwa kwepamusoro mashandiro echishandiso kunowedzera, basa reammonia muindasitiri richaramba richikura. Izvi ndezvechokwadi kunyanya mune yakakwirira-chaiyo nano-chiyero chakabatanidzwa maseketi, quantum computing machipisi, uye yepamusoro yekurongedza matekinoroji. Pamusoro pezvo, sezvo mirau yezvakatipoteredza ichiwedzera kuomarara, kusimudzira kugadzirwa kwakasvibira uye tekinoroji yekudzokorodza yeammonia inozove chinhu chakakosha mune ramangwana reindasitiri.

Zvishandiso zveammonia muindasitiri yesemiconductor zvinopa hwaro hwakasimba hwekuvandudzwa kwemagetsi emazuva ano. Basa rayo mukuvandudza kugona kwekugadzira, kuderedza mitengo yekugadzira, uye kutyaira tekinoroji hunyanzvi hwakakosha. Sezvo tekinoroji ichifambira mberi, mashandisirwo eammonia acharamba achiwedzera, kubatsira iyo semiconductor indasitiri kushanduka ikanangana nekubudirira kukuru uye kuchengetedza kwezvakatipoteredza.

Ammonia, sechinhu chakakosha chemakemikari reagent, inoita basa rakakosha mukugadzira semiconductor. Izvo zvakakosha pakuiswa kwemafirimu nitride, doping, uye kuchenesa / etching maitiro. Nekuenderera mberi kwe tekinoroji yesemiconductor tekinoroji, zvikumbiro zveammonia zvakaiswa kuti zvikure, zvichiita mipiro yakakosha mukufambira mberi kwetekinoroji uye kubatsira iyo semiconductor indasitiri kushanduka nenzira inoshanda uye ine hushamwari.