Ammonia (NH₃), Sechikonzero chakakosha chemakemikari, chine maficha akapararira kumativi akasiyana-siyana endustamilamu, nebasa rayo riri kunyanya akakosha muMicononductor gadzira. Ammonia inoita basa rakakosha mumatanho akati wandei eMicemonductor kugadzirwa, kusanganisira kuiswa kweNitreides, Ion kusimbisa uye kugadzirisa, kuchenesa, uye maitiro ekuchenesa. Ichi chinyorwa chichasimbisa mukunyorera kweAmonictor Indasitiri, kuongorora iyo yakakosha basa mukuwedzera basa rekushandisa, kuderedza mari, uye kuendesa maindasitiri, ukuwo kuchikurukura nematambudziko azvinoita uye nezvenguva yemberi.

1. Zvekutanga zvivakwa uye makemikari maitiro eAMMONIA

Amonia inzvimbo yakagadzirwa neiyo nitrogen uye hydrogen, inozivikanwa nekuda kweiyo yakasimba alkalinity uye inowanzowanikwa mune maindasitiri nitrogen fettilizer kugadzirwa. Ammonia iripo segesi pamhepo tembiricha asi inogona kuve yakaderedzwa pakudziya kwakaderera, ichiita kuti ive sosi yakasarudzika yegasi. MuSemiconductor Indasitiri, iyo makemikari zvivakwa zvemaAmoni anozviita chikamu chepakati chakati wandei maitiro, kunyanya mumakemikari apocapurition (CVD), Ion kusimbisa, uye kuchenesa / etching mabasa.

Amonia mamoroni anogona kuita nemasimbi akasiyana-siyana, silicon, uye zvimwe zvinhu zvekugadzira nitreides kana kuvaburitsa. Aya maitiro haangobatsiri pakugadzira zvinhu zvemafirimu akaonda asi zvakare anovandudza zvivakwa zvemagetsi, zvinopisa, uye zvichemo zvezvinyorwa zvekushandisa, nekudaro zvichikonzera Semiconductor tekinoroji.

2. Zvikumbiro zveAmoni muMicononductor Exercing

Amonia anoita basa rakakosha muSemiconductor Restocturing, kunyanya munzvimbo dzinotevera:

2.1 kuiswa kweiyo nitride yakatetepa mafirimu

MuMesiconductor Semiconductor, Nitride akaonda mafirimu, akadai silicon nitride (si₃n₄), aln₄ nitide (thin), tin), inoshandiswa zvakanyanya seyekudzivirira matare, emagetsi kusazviparadzaniswa kwemagetsi, kana zvekuita zvinhu. Munguva yekuiswa kweaya mafirimu eitride, Ammonia inoshanda seyakakosha nitrogen sosi.

Chemical Vapor Deposition (CVD) ndeimwe yenzira dzakajairika dzeNitride firimu demosition. Ammonia Inosangana nemagasi akadai silane (Sih₄) pakupisa kwakanyanya kuti gadzirise uye fomu silicon nitride mafirimu mafirimu. Maitiro ari seinotevera:

3Sih4 + 4NH3 → Si3n4 + 12H2

Maitiro aya anoguma nekuumbwa kweunifomu silicon nitreide layer paSilicon Wafer. Ammonia inopa sosi yakagadzikana uye inogonesa kudzora chaiko kweiyo maitiro neimwe gasi masosi pasi pemamiriro ezvinhu, nekudaro kudzora kunaka, ukobvu, uye kufanana kwefirimu.

Mafirimu ehutachiona ane simba rakanakisa, kusimbisa kwemagetsi, uye oxidation kuramba, kuzviita kwakakosha zvakanyanya muSemiconductor kugadzira. Ivo vanoshandiswa zvakanyanya mumatunhu akasanganiswa (ics) sekusimbisa maratidziro, electrode yekuparadzanisa matanda, uye Optical windows muOptoelectronic zvishandiso.

2.2 ion kubviswa uye kugadzirisa

Ammonia zvakare anoita basa rakakosha muDoPing maitiro eMicononductor zvinhu. Dising maitiro akakosha anoshandiswa kudzora magetsi ekuita magetsi ekugadzira mufambi weMicononductor Match Amonia, seyakabudirira nitrogen sosi, inowanzo shandiswa pamwe nemamwe magasi (senge phosphine ph₃ uye diborane b₂h₆) kuti isimbe nitrogen nothon uye gaas) kuburikidza neIon) kubudikidza neIon.

Semuenzaniso, nitrogen doping inogona kugadzirisa zvivakwa zvemagetsi zveSilicon kugadzira n-mhando kana p-mhando semicondhuctors. Munguva yeNitrogen Doping maitiro, Ammonia inopa yakanyanya-yekuchena nitrogen sosi, inoona kudzora chaiko pamusoro pekugadzirisa pfungwa. Izvi zvinokoshesesa kuti miniaturization uye kugadzirwa kwemidziyo yakakwirira-yekuita mune-yakakura-chiyero yekubatanidza (VLSI) kugadzira.

2.3 kuchenesa uye etching

Kuchenesa uye maitiro ekuchera zvakakosha kuti uve nechokwadi chemhando yemidziyo mumicononductor kugadzira. AMNONA inoshandiswa zvakanyanya mune izvi maitiro, kunyanya mu plasma etching uye makemikari kuchenesa.

MuPlasma etching, Amonia inogona kusanganiswa nemamwe magasi (senge chlorine, clă) kubatsira kubvisa zvinangwa zve organic, oxides, uye kusvibiswa kwesimbi kubva pachigadzirwa. Semuenzaniso, Ammonia inobata neokisijeni kuti igadzire maitiro eokisijeni eokisijeni (senge o₃ naO₂), inobvisa zvinokwanisika kubvisa mhou uye kuve nechokwadi chekugadzikana mune inotevera maitiro.

Pamusoro pezvo, Amonia inogona kuita solvent mukuchenesa maitiro, kubatsira kubvisa trace zvakasara zvakaumbwa nekuda kwekuita kwemakemikari kana maitiro ekusagadzikana, nekudaro kuchena kwakanyatsonaka kweakatsamwa.

3. Zvakanakira Amonia mumiconondductor Indasitiri

Ammonia inopa akati wandei zvakanakira muMicononductor gadzira, kunyanya munzvimbo dzinotevera:

3.1 inoshanda nitrogen sosi

Amonia ndiyo inoshanda uye yakachena nitrogen inopa yakagadzikana uye chaiyo yekupa maatomu echitambiro cheNitrogen yeSoundition yemafirimu ekutungamira uye maitiro ekugadzirisa. Izvi zvakakosha pakutamiswa kweiyo micro- uye nano-zviyero zvishandiso muSemiconductor kugadzira. Muzviitiko zvakawanda, Amonia inonyanya kushanda uye inodzorwa kupfuura mamwe magasi eNitrogen masasi (senge nitrogen gasi kana nitrogen oolides).

3.2 Yakanakisa maitiro ekugadzirisa

Iyo yekuona yeAmmonia inobvumira kuti ive chaiyo yekudzora maitiro ekugadzirisa maitiro uye gobvu yefirimu mune dzakasiyana siyana maitiro akaoma. Nekugadzirisa huwandu hwekuyerera kweAmmonia, tembiricha, uye kuita nguva, kufanana, kufanana, uye hunhu hwemafirimu, nokudaro optimizing mashandiro emidziyo.

3.3 mutengo-kushanda uye kushamwaridzana kweushamwari

Kuenzaniswa nedzimwe magasi eNitrogen Source, Ammonia yakaderera mumutengo uye ine yakakwira nitrogen yekushandisa kugona, ichiita kuti ibatsire kwazvo mumiconondructor kugadzirwa. Uyezve, Amonia yekudzokorora uye tekinorodza ekushandisa zvave kuwedzeredza, kupa kune kwayo kushamwaridzana kweushamwari.

4. Kuchengetedza uye zvakatipoteredza matambudziko

Pasinei nebasa rayo rakakosha muSemiconductor Kugadzira, Ammonia inopa njodzi dzinogona kuitika. Pamhepo tembiricha, amonia gasi, uye mune yayo yemvura fomu, inokatyamadza uye ine muchetura, inoda nzira dzakasimba pakushandisa panguva yekushandisa.

1. Kuchengetedza uye Kufambisa.
2. Kuchengetedza Basa: Operators muMicononductor Production mitsara inoda kupfeka michina yekudzivirira, senge goggles, magurovhosi, uye masks gasi, kudzivirira kuoneka kumuviri wemunhu.
3. Kurapa kwegasi kurapwa.

Sezvo Semiconductor yekugadzira maitiro anoenderera mberi nekufambira mberi uye kudiwa kwekuita kwepamusoro kwekuita kunowedzera, basa raAmmonia muindasitiri richaramba richikura. Izvi zvinonyanya kuitika mukukwira-kwakanyanya-chaiko-chiyero chakabatanidzwa masenduru, huwandu hwekutora machipisi, uye admanced matekinoroji ekodhi. Pamusoro pezvo, sezvo mirau yezvakatiparadzaniswa, kukudziridzwa kwekugadzirwa kweGreener

Zvikumbiro zvaAmonia mumifananidzo yeSecomonductor inopa hwaro hwakasimba hwekusimudzira kwemagetsi emazuva ano. Basa rayo mukuvandudza mari yekugadzira, kuderedza mari yekugadzira, uye kutyaira tekinoroji kunokosha kunokosha. Semunhu tekinoroji, kushandisa kwaAmoni kucharamba kuchawedzera, kubatsira indasitiri yeSemiconductor kunoita kuti ishandiswe yakakura uye kutsigirwa kwezvakatipoteredza.

Ammonia, sechinhu chakakosha chemakemikari, anoita basa rakarukwa muMicononductor Gucturing. Izvo zvakakosha kuti zvigadziriswe zve nitride mafirimu, Dising, uye kuchenesa / etching maitiro. Nekuenderera mberi kwekufambira mberi kweTekinoroji yeMiconductor, maAmonia yaAmbimoni anoiswa kukura, achiwedzera mipiro kune mafambiro ehunyanzvi uye kubatsira indasitiri yemutemo kunoitika mukubudirira uye kuturirana.