Alamanuia vaega

Faatasi ai ma le atinaʻeina o tekonolosi faʻaaliga faʻapipiʻi, e manaʻomia e tagata faʻatau nisi kasa faʻapitoa ma fesoʻotaʻiga tomai faʻapitoa ma poto masani. Huazhong Gas e tu'uina atu i tagata fa'atau fa'aaliga mafolafola fa'atasi ma le tele o mea fa'apitoa kasa, e aofia ai le doping, fa'apipi'i ata, etching ma le fa'amamaina o potu Talosaga.

O oloa fautuaina mo lau pisinisi

Silane

E masani ona fa'aaogaina le kasa silane fa'aeletonika i le gaosiga o le TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) i totonu o le fa'alapotopotoga fa'aaliga, ma le tu'uina atu o TFT po'o le LTPS substrates mo LCDs.

Amonia

Faʻatasi ma le silane, e fausia ai le silicon nitride layer o a-Si transistors.

Kesi fefiloi

O le gaosiga o le LTPS ma le MOS transistors ua faʻateleina le faʻaogaina o le nitrous oxide. Mai le vaaiga o le taumafaina ma le faʻaaogaina i le gaosiga o le MO, ua sili atu le N2O i le NF3 e avea ma mea faʻaoga eletise sili ona faʻaaogaina i le gaosiga o MO.

nitrogen trifluoride

NF3 o le mea e sili ona faʻaaogaina eletise i le a-Si ma le LTPS faʻaaliga faʻaalia ma e masani ona faʻaaogaina mo le faʻamamaina o potu PECVD.