Inganda zikoresha inganda

Dutanga imiyoboro yumuzunguruko / semiconductor hamwe na gaze zidasanzwe zisabwa mubikorwa nka diffuzione, lithographie, kubitsa, kurira, doping, no gukora isuku.

Ibicuruzwa bisabwa mu nganda zawe

Azote trifluoride

Imiti ikoreshwa hagati ya gaze ya elegitoronike nikintu igomba gushyirwaho irakenewe mubikorwa byinganda. Muburyo bwo guhingura ibicuruzwa bya wafer, birakenewe gukoresha gaze yihariye ya elegitoronike kugirango ikureho igice cyometse kugirango ugere ku ntego yo guterana icyerekezo.

Silane

Mu nganda za semiconductor, silane ikoreshwa cyane mugukora polysilicon ifite isuku nyinshi, firime ya dioxyde de silicon, nitride ya silicon nitride, polysilicon yo kwigunga, nibindi, kandi irashobora no gukoreshwa mugukora ingirabuzimafatizo zuba, fibre optique hamwe na sensororo yifoto, nibindi.

Gasmixture

Nka gaze ya elegitoronike, okiside ya nitrous ikoreshwa cyane mubikorwa bya firime ya dielectric yoroheje mugutezimbere no gukora ibikoresho bya semiconductor optoelectronic. Nibintu byingenzi bidasubirwaho gazi yibintu bigira ingaruka kumiterere yibikoresho bya optoelectronic.