NF3 99,999% ubuziranenge Azote trifluoride Inganda za elegitoronike NF3
Azote trifluoride itegurwa na fluorination ya ammonia itaziguye. Irashobora kandi kuboneka hamwe na electrolysis ya ammonium bifluoride yashongeshejwe cyangwa muguhuza mu buryo butaziguye azote yibanze na fluor ukoresheje amashanyarazi mu bushyuhe buke.
Azote trifluoride ni gaze nziza ya plasma itera inganda munganda ziciriritse, cyane cyane ikwiranye na nitride ya silicon na silicon, hamwe nibiciro biri hejuru no guhitamo. Azote trifluoride irashobora gukoreshwa nka lisansi yingufu nyinshi cyangwa nka okiside ya lisansi yingufu nyinshi. Azote trifluoride irashobora kandi gukoreshwa mumashanyarazi menshi ya lazeri nka okiside ya hydrogène fluoride. Muburyo bwa firime yoroheje kubikorwa bya semiconductor hamwe na TFT-LCD, azote trifluoride ikora nka "agent", ariko iyi suku ni gaze, ntabwo ari amazi. Azote trifluoride irashobora gukoreshwa mugutegura tetrafluorohydrazine na fluorocorbon olefin.
NF3 99,999% ubuziranenge Azote trifluoride Inganda za elegitoronike NF3