Inganda

Hamwe niterambere ryibikoresho byerekana tekinoroji, abakiriya bakeneye imyuka idasanzwe nubumenyi bwumwuga bijyanye nuburambe. Huazhong Gas itanga abakiriya berekana ibikoresho bitandukanye bya gaze idasanzwe, harimo doping, kubika firime, gutunganya no gusukura ibyumba Porogaramu.

Ibicuruzwa bisabwa mu nganda zawe

Silane

Gazi ya elegitoroniki ya silane ikoreshwa cyane cyane mugukora TFT (Thin Film Transistor) / LCD (Liquid Crystal Display) mu nganda zerekana, hamwe no kohereza TFT cyangwa LTPS substrate ya LCDs.

Amoniya

Hamwe na silane, ikora nitride ya silicon ya tristoriste.

Gasmixture

Umusaruro wa LTPS na MOS transistors wongereye ikoreshwa rya azote. Urebye gukoresha no gukoresha mu musaruro wa MO, N2O yarenze NF3 kugirango ibe ibikoresho bya elegitoroniki bikoreshwa cyane mu musaruro wa MO.

azote trifluoride

NF3 ni ibikoresho bya elegitoroniki bikoreshwa cyane mubikorwa bya a-Si na LTPS kandi bikoreshwa cyane mugusukura ibyumba bya PECVD.