Amoniya Gusaba munganda za Semiconductor

Amoniya (NH₃), nkimiti yingenzi ya reagent, imaze gukoreshwa mubikorwa bitandukanye byinganda, uruhare rwayo rukaba rufite akamaro kanini mubikorwa bya semiconductor. Amoniya igira uruhare runini mubyiciro byinshi byumusaruro wa semiconductor, harimo no gushira nitride, gushiramo ion na doping, gusukura, no gutunganya. Iyi ngingo izasesengura ikoreshwa rya ammonia mu nganda ziciriritse, isesengura uruhare rwayo mu kuzamura imikorere y’ibikoresho, kugabanya ibiciro, no gutwara udushya mu nganda, mu gihe hanaganirwaho ku mbogamizi ihura nazo n’iterambere ry’ejo hazaza.

1. Ibyiza byibanze nimyitwarire ya shimi ya Amoniya

Amoniya ni uruvange rugizwe na azote na hydrogène, izwiho gukomera kwinshi kandi ikunze kuboneka mu musaruro w'ifumbire mvaruganda ya azote. Amoniya ibaho nka gaze mubushyuhe bwicyumba ariko irashobora gutwarwa nubushyuhe buke, bigatuma iba isoko ya gaze cyane. Mu nganda za semiconductor, imiterere yimiti ya ammonia ituma iba intandaro yibikorwa byinshi bikomeye, cyane cyane mubitera imyuka ya chimique (CVD), gutera ion, hamwe nibikorwa byogusukura / gutobora.

Molekile ya Amoniya irashobora kwitwara hamwe nibyuma bitandukanye, silikoni, nibindi bikoresho kugirango bibe nitide cyangwa kubikora. Izi reaction ntabwo zifasha gusa mugukora ibikoresho bya firime byifuzwa gusa ahubwo binatezimbere amashanyarazi, ubushyuhe, nubukanishi bwibikoresho, bityo bitezimbere tekinoroji ya semiconductor.

2. Gukoresha Amoniya mu Gukora Semiconductor

Amoniya igira uruhare runini mu gukora semiconductor, cyane cyane mu bice bikurikira:

2.1 Gushyira kwa Nitride Ntoya

Mubikorwa bigezweho bya semiconductor, firime ya nitride yoroheje, nka nitride ya silicon (Si₃N₄), nitride ya aluminium (AlN), na nitride ya titanium (TiN), ikoreshwa cyane nkibice bikingira, ibice by’amashanyarazi, cyangwa ibikoresho byayobora. Mugihe cyo gushira ama firime ya nitride, ammonia ikora nkisoko ya azote ikomeye.

Imyuka ya chimique (CVD) ni bumwe muburyo bukunze gukoreshwa muri nitride.Amoniyaikora hamwe na gaze nka silane (SiH₄) mubushyuhe bwinshi kugirango ibore kandi ikore firime nitride ya silicon. Igisubizo niki gikurikira:

3SiH4 + 4NH3 → Si3N4 + 12H2

Ubu buryo butuma habaho nitride ya silicon imwe hejuru ya silicon wafer. Amoniya itanga isoko ya azote ihamye kandi igafasha kugenzura neza uko bitwara hamwe nandi masoko ya gaze mubihe byihariye, bityo bikagenzura ubuziranenge, ubunini, nuburinganire bwa firime.

Filime ya Nitride ifite ubushyuhe buhebuje bwumuriro, izirinda amashanyarazi, hamwe na okiside irwanya okiside, bigatuma iba ingenzi cyane mubikorwa bya semiconductor. Zikoreshwa cyane mumuzunguruko (IC) nkibice byokwirinda, ibyuma bya electrode bitandukanya, hamwe na windows optique mubikoresho bya optoelectronic.

2.2 Gutera Ion na Doping

Amoniyaigira kandi uruhare runini mugikorwa cya doping cyibikoresho bya semiconductor. Doping nubuhanga bukomeye bukoreshwa mugucunga amashanyarazi yibikoresho muguhimba ibikoresho bya semiconductor. Amoniya, nkisoko ya azote ikora neza, ikoreshwa kenshi hamwe nizindi myuka (nka fosifine PH₃ na diborane B₂H₆) kugirango yinjize azote mubikoresho nka silicon na gallium arsenide (GaAs) binyuze mu gutera ion.

Kurugero, doping ya azote irashobora guhindura amashanyarazi ya silicon kugirango ikore N-ubwoko bwa P cyangwa se P-semiconductor. Mugihe cyiza cya doping ya azote, ammonia itanga isoko ya azote yuzuye-isukuye neza, igenzura neza neza ibiyobyabwenge bya doping. Ibi nibyingenzi kuri miniaturizasiya no kubyaza umusaruro ibikoresho bikora cyane murwego runini cyane rwo kwishyira hamwe (VLSI).

2.3 Isuku no Kuzunguruka

Isuku nogukora ni urufunguzo rwo kwemeza ubuziranenge bwibikoresho mu gukora semiconductor. Amoniya ikoreshwa cyane muribi bikorwa, cyane cyane mugukora plasma no gusukura imiti.

Mu gutera plasma, ammonia irashobora guhuzwa nizindi myuka (nka chlorine, Cl₂) kugirango ifashe gukuraho umwanda kama, ibice bya oxyde, hamwe n’umwanda wibyuma hejuru ya wafer. Kurugero, ammoniya ikorana na ogisijeni kugirango itange ubwoko bwa ogisijeni ikora (nka O₃ na O₂), ikuraho neza okiside yo hejuru kandi ikanemeza ituze mubikorwa bizakurikiraho.

Byongeye kandi, ammonia irashobora gukora nkigisubizo mugikorwa cyogusukura, ifasha gukuraho ibisigazwa byimyanda byakozwe bitewe nubushakashatsi bwimiti cyangwa amakosa yatunganijwe, bityo bikagumana isuku ryinshi rya wafer.

3. Ibyiza bya Amoniya mu nganda za Semiconductor

Amoniya itanga ibyiza byinshi mubikorwa bya semiconductor, cyane cyane mubice bikurikira:

3.1 Inkomoko ya Azote nziza

Amoniya ni isoko ya azote ikora neza kandi yera itanga itangwa rihamye kandi ryuzuye rya atome ya azote yo gushira firime ya nitride hamwe na doping. Ibi nibyingenzi muguhimba ibikoresho bya micro- na nano-nini mubikorwa bya semiconductor. Kenshi na kenshi, ammonia irakora cyane kandi irashobora kugenzurwa kuruta iyindi myuka ya azote (nka gaze ya azote cyangwa okiside ya azote).

3.2 Igenzura ryiza cyane

Imyitwarire ya ammonia ituma igenzura neza igipimo cyibisubizo hamwe nubunini bwa firime mubikorwa bitandukanye bigoye. Muguhindura umuvuduko wa ammonia, ubushyuhe, nigihe cyo kubyitwaramo, birashoboka kugenzura neza umubyimba, uburinganire, nibiranga imiterere ya firime, bityo ugahindura imikorere yibikoresho.

3.3 Ikiguzi-Cyiza nubucuti bwibidukikije

Ugereranije nizindi myuka ya azote, ammonia iba mike mugiciro kandi ifite uburyo bwiza bwo gukoresha azote, bigatuma iba nziza cyane mubikorwa binini bya semiconductor. Byongeye kandi, gutunganya amoniya no gukoresha ikoranabuhanga bigenda bitera imbere, bigira uruhare mu kubungabunga ibidukikije.

4. Umutekano n’ibibazo by’ibidukikije

Nubwo ifite uruhare runini mu gukora semiconductor, ammonia irerekana ingaruka zishobora kubaho. Ku bushyuhe bwicyumba, ammonia ni gaze, kandi muburyo bwamazi, irashobora kwangirika cyane kandi ni uburozi, bisaba ingamba zikomeye z'umutekano mugihe zikoreshwa.

1. Kubika no Gutwara: Amoniya igomba kubikwa ku bushyuhe buke n’umuvuduko mwinshi, ukoresheje ibikoresho byabugenewe hamwe n’imiyoboro kugirango wirinde kumeneka.
2. Umutekano wibikorwa: Abakora mumirongo itanga umusaruro wa semiconductor bakeneye kwambara ibikoresho birinda nka gogles, gants, na masike ya gaze, kugirango birinde amoniya kumubiri wumuntu.
3. Gutunganya imyanda: Gukoresha ammoniya bishobora kubyara imyanda yangiza, bityo uburyo bunoze bwo gutunganya imyanda igomba kuba ihari kugirango imyuka ihumanya yujuje ubuziranenge bwibidukikije.

Mugihe ibikorwa byo gukora semiconductor bikomeje gutera imbere kandi nibisabwa kugirango ibikoresho bikorwe byiyongere, uruhare rwa ammonia mu nganda ruzakomeza kwiyongera. Ibi ni ukuri cyane cyane murwego rwo hejuru-nano-nini ihuriweho hamwe, imashini ya comptabilite, hamwe na tekinoroji yo gupakira. Byongeye kandi, uko amabwiriza y’ibidukikije agenda arushaho gukomera, iterambere ry’umusaruro w’icyatsi n’ikoranabuhanga rya ammoniya rizaba ikintu gikomeye mu bihe biri imbere by’inganda.

Amoniya ikoresha mubikorwa bya semiconductor itanga urufatiro rukomeye rwo guteza imbere ibikoresho bya elegitoroniki bigezweho. Uruhare rwayo mu kuzamura umusaruro, kugabanya ibiciro byinganda, no gutwara udushya mu ikoranabuhanga ni ngombwa. Mugihe ikoranabuhanga rigenda ritera imbere, ikoreshwa rya ammonia rizakomeza kwaguka, rifasha inganda ziciriritse gutera imbere zigana ku mikorere myiza no kubungabunga ibidukikije.

Amoniya, nkimiti yingenzi ya reagent, igira uruhare runini mugukora semiconductor. Nibyingenzi kubitsa firime ya nitride, doping, hamwe nogusukura / gutunganya. Hamwe nogukomeza gutera imbere kwikoranabuhanga rya semiconductor, porogaramu za ammonia zigiye kwiyongera, zitanga umusanzu munini mugutezimbere ikoranabuhanga no gufasha inganda ziciriritse gutera imbere muburyo bwiza kandi bwangiza ibidukikije.