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Nitrogen Trifluoride 99.99% purity Industrial Grade Gas NF3
In the preparation method, nitrogen trifluoride can be synthesized by ammonia and fluorine in the catalysis of copper, or in the reaction of urea and elemental fluorine in anhydrous hydrogen fluoride. These preparation methods demonstrate their feasibility and efficiency in industrial production.
It is important to note that nitrogen trifluoride is a greenhouse gas and may exacerbate the greenhouse effect, so its use should be limited.
Nitrogen trifluoride (NF3) is an important industrial gas mainly used in plasma etching, high energy chemical lasers, and semiconductor manufacturing processes in the microelectronics industry. In the microelectronics industry, nitrogen trifluoride plays an important role in semiconductor manufacturing because of its high selectivity and rate for silicon and silicon nitride as an etching gas. In addition, nitrogen trifluoride can also be used in high-energy chemical lasers and chemical vapor deposition technology.
Nitrogen Trifluoride 99.99% purity Industrial Grade Gas NF3
Parameter
Property
Value
Appearance and properties
Colorless gas with musty smell
Melting point (℃)
-208.5
PH value
Meaningless
Critical temperature (℃)
-39.3
Critical pressure (MPa)
4.53
Boiling point (℃)
-129
Flash point (°C)
Meaningless
Upper explosion limit % (V/V)
Meaningless
Solubility
Insoluble in water
Relative density (water = 1)
1.89
Relative vapor density (air = 1)
2.46
Saturated vapor pressure (kPa)
No data available
Octanol/water partition coefficient
No data available
Ignition temperature (°C)
Meaningless
Lower explosive limit % (V/V)
Meaningless
Safety Instructions
Emergency overview: colorless gas with musty odor; Toxic, can cause or aggravate combustion; Oxidizing agent; Gas under pressure, if heated can explode; Long-term or repeated exposure can cause organ damage; Harmful by inhalation. GHS risk categories: Oxidizing gas -1, pressurized gas - compressed gas, specific target organ system toxicity repeated contact -2, acute toxicity - inhalation -4. Warning word: Danger Risk description: can cause or aggravate combustion: Oxidizer: containing gas under pressure, if heated can explode: long-term or repeated contact can cause organ damage; Harmful by inhalation.
Precautions: Preventive measures: Operators must be specially trained and strictly follow the operating procedures. Tightly sealed to provide adequate local exhaust and full ventilation. It is recommended that operators wear personal protective equipment. Prevent gas leakage into the workplace air. Keep away from fire and heat. Smoking is strictly prohibited in the workplace. Keep away from flammable and combustible materials. Avoid contact with reducing agents. Light loading and unloading during handling to prevent cylinder and accessories damage. Do not release into the environment. Accident response: If inhaled quickly away from the scene to the fresh air. Keep your airway clear. Administer oxygen if breathing is difficult. If breathing and heart stop, start CPR immediately. Seek medical attention. Collect leaks. In case of fire, cut off the air source, firefighters wear gas masks, and stand upwind to extinguish the fire at a safe distance. Safe storage: Store in a cool, ventilated toxic gas warehouse. The temperature in the warehouse should not exceed 30℃. It should be stored separately from combustible materials, reducing agents, edible chemicals, etc., and should not be mixed. Storage area should be equipped with leakage emergency treatment equipment. · Disposal of waste: disposal in accordance with the requirements of relevant national and local regulations. Or contact the manufacturer to determine the disposal party dharma. Physical and chemical hazards: toxic, oxidizing, can cause or exacerbate combustion, harmful to the environment. Subject to impact, friction, in case of open fire or other ignition source is extremely explosive. It is easy to ignite when in contact with combustibles. Health hazard: Irritant to respiratory tract. It may affect the liver and kidneys. Repeated or long-term inhalation exposure may cause fluorosis. Environmental hazard: harmful to the environment
Applications
Semiconductor
Solar Photovoltaic
LED
Machinery Manufacturing
Chemical Industry
Medical Treatment
Food
Scientific Research
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