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Nitrogen trifluoride

Nitrogen trifluoride is prepared by direct fluorination of ammonia. It can also be obtained by electrolysis of molten ammonium bifluoride or by the direct combination of elemental nitrogen and fluorine using an electrical discharge at low temperatures.

Purity or Quantity	carrier	volume
99.99%	Cylinder/Tube Cart	Y bottle/12 tube bundle

Inquiry

The chemical formula of nitrogen trifluoride is NF₃. It is a colorless, odorless and stable gas at room temperature. It is a strong oxidizing agent. High-purity nitrogen trifluoride has excellent etch rate and selectivity and is also a very good cleaning agent. Huazhong can provide you with high-purity nitrogen trifluoride gas to improve your semiconductor process.