Panel industry

Ndi chitukuko cha ukadaulo wowonetsera gulu lathyathyathya, makasitomala amafunikira mipweya yapadera kwambiri komanso chidziwitso chaukadaulo komanso chidziwitso. Huazhong Gas amapereka lathyathyathya gulu anasonyeza makasitomala ndi osiyanasiyana zipangizo wapadera mpweya, kuphatikizapo doping, filimu mafunsidwe, etching ndi chipinda kuyeretsa njira Mapulogalamu.

Zopangira zovomerezeka zamakampani anu

Silane

Mpweya wa silane wamagetsi amagwiritsidwa ntchito makamaka popanga TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) m'makampani owonetsera, ndikuyika magawo a TFT kapena LTPS a ma LCD.

Ammonia

Kuphatikizidwa ndi silane, imapanga silicon nitride wosanjikiza wa a-Si transistors.

Kusakaniza gasi

Kupanga kwa LTPS ndi MOS transistors kwawonjezera kugwiritsa ntchito nitrous oxide. Potengera momwe mungagwiritsire ntchito ndikugwiritsa ntchito popanga MO, N2O yapitilira NF3 kukhala zida zamagetsi zomwe zimagwiritsidwa ntchito kwambiri popanga MO.

nayitrogeni trifluoride

NF3 ndizomwe zimagwiritsidwa ntchito kwambiri pamagetsi pakupanga ma a-Si ndi LTPS ndipo zimagwiritsidwa ntchito makamaka poyeretsa zipinda za PECVD.