Kugwiritsa ntchito Ammonia mu Semiconductor Viwanda

Ammonia (NH₃), monga reagent yofunikira yamankhwala, imakhala ndi ntchito zambiri m'mafakitale osiyanasiyana, ndipo gawo lake ndi lofunikira kwambiri pakupanga ma semiconductor. Ammonia imagwira ntchito yofunikira pamagawo angapo opanga semiconductor, kuphatikiza kuyika kwa nitrides, kuyika ma ion ndi doping, kuyeretsa, ndi njira zolumikizira. Nkhaniyi ifotokoza za momwe ammonia amagwirira ntchito mumakampani opangira zida zopangira zida zamagetsi, kuwunika ntchito yake yayikulu pakukweza magwiridwe antchito a chipangizocho, kuchepetsa mtengo, komanso kuyendetsa bwino ntchito zamakampani, ndikukambilananso zovuta zomwe zimakumana nazo komanso momwe zitukuko zidzakhalire.

1. Zinthu Zofunika Kwambiri ndi Makhalidwe Amankhwala a Ammonia

Ammonia ndi mankhwala opangidwa ndi nayitrogeni ndi haidrojeni, omwe amadziwika kuti ndi amchere amphamvu ndipo amapezeka m'mafakitale opanga feteleza wa nayitrogeni. Ammonia imapezeka ngati mpweya wotentha kwambiri, koma imatha kusungunuka pakatentha pang'ono, ndikupangitsa kuti ikhale gwero lamphamvu kwambiri la gasi. M'makampani a semiconductor, mankhwala a ammonia amawapangitsa kukhala gawo lalikulu lazinthu zingapo zofunika kwambiri, makamaka pakuyika mankhwala a vapor deposition (CVD), implantation ya ion, ndi kuyeretsa / kuyika ntchito.

Mamolekyu a ammonia amatha kuchitapo kanthu ndi zitsulo zosiyanasiyana, silicon, ndi zinthu zina kupanga ma nitridi kapena kuwapaka. Zochita izi sizimangothandiza kupanga filimu yopyapyala yomwe mukufuna komanso kumapangitsanso mphamvu zamagetsi, kutentha, komanso makina azinthuzo, potero kupititsa patsogolo luso la semiconductor.

2. Kugwiritsa ntchito Ammonia mu Semiconductor Manufacturing

Ammonia imagwira ntchito yofunika kwambiri popanga semiconductor, makamaka m'malo otsatirawa:

2.1 Kuyika Mafilimu a Nitride Thin

Popanga ma semiconductor amakono, mafilimu oonda a nitride, monga silicon nitride (Si₃N₄), aluminium nitride (AlN), ndi titanium nitride (TiN), amagwiritsidwa ntchito kwambiri ngati zigawo zoteteza, zigawo zodzipatula zamagetsi, kapena zida zoyendetsera. Panthawi yoyika mafilimu a nitride, ammonia amagwira ntchito ngati gwero la nayitrogeni.

Chemical vapor deposition (CVD) ndi imodzi mwa njira zodziwika bwino pakuyika filimu ya nitride.Ammoniaimakhudzidwa ndi mpweya monga silane (SiH₄) pa kutentha kwakukulu kuti iwononge ndikupanga mafilimu a silicon nitride. Zomwe zimachitika ndi izi:

3SiH4+4NH3→Si3N4+12H2

Izi zimapangitsa kuti pakhale yunifolomu ya silicon nitride pamwamba pa silicon wafer pamwamba. Ammonia amapereka khola gwero la nayitrogeni ndipo imathandizira kuwongolera bwino momwe zimachitikira ndi magwero ena a gasi pansi pazikhalidwe zina, potero amawongolera mtundu, makulidwe, ndi kufanana kwa filimuyo.

Makanema a Nitride ali ndi kukhazikika kwamafuta, kutsekemera kwamagetsi, komanso kukana kwa okosijeni, zomwe zimawapangitsa kukhala ofunikira kwambiri pakupanga semiconductor. Amagwiritsidwa ntchito kwambiri m'mabwalo ophatikizika (ICs) ngati zigawo zosungunulira, zigawo zopatula ma electrode, ndi mazenera owoneka bwino pazida za optoelectronic.

2.2 Kuyika Ion ndi Doping

Ammoniaimagwiranso ntchito yofunika kwambiri pakupanga doping ya zida za semiconductor. Doping ndi njira yofunika kwambiri yomwe imagwiritsidwa ntchito kuwongolera mphamvu zamagetsi zamagetsi popanga zida za semiconductor. Ammonia, monga gwero labwino la nayitrogeni, nthawi zambiri amagwiritsidwa ntchito limodzi ndi mpweya wina (monga phosphine PH₃ ndi diborane B₂H₆) kuti akhazikitse nayitrogeni muzinthu monga silicon ndi gallium arsenide (GaAs) kudzera mu implantation ya ion.

Mwachitsanzo, doping ya nayitrogeni imatha kusintha mawonekedwe amagetsi a silicon kuti apange ma semiconductors amtundu wa N kapena P. Panthawi yochita bwino ya nayitrogeni ya doping, ammonia imapereka gwero la nayitrogeni wambiri, ndikuwonetsetsa kuwongolera kokwanira kwa doping. Izi ndizofunikira kuti pakhale miniaturization ndi kupanga zida zogwira ntchito kwambiri pakupanga zazikulu kwambiri zophatikizira (VLSI).

2.3 Kuyeretsa ndi Kuyika

Njira zoyeretsera ndi etching ndizofunikira kwambiri pakuwonetsetsa kuti zida zili pamwamba pakupanga semiconductor. Ammonia amagwiritsidwa ntchito kwambiri m'njirazi, makamaka popangira plasma etching ndi kuyeretsa mankhwala.

Mu plasma etching, ammonia akhoza kuphatikizidwa ndi mpweya wina (monga chlorine, Cl₂) kuti athandize kuchotsa zonyansa za organic, oxide layers, ndi zonyansa zachitsulo kuchokera pamwamba. Mwachitsanzo, ammonia imakhudzidwa ndi okosijeni kuti ipange mitundu ya okosijeni yokhazikika (monga O₃ ndi O₂), yomwe imachotsa bwino ma oxides apamtunda ndikuwonetsetsa kukhazikika munjira zotsatila.

Kuonjezera apo, ammonia amatha kukhala ngati zosungunulira poyeretsa, kuthandizira kuchotsa zotsalira zomwe zimapangidwa chifukwa cha zochitika za mankhwala kapena kukonza zolakwika, motero kusunga chiyero chapamwamba cha mkatewo.

3. Ubwino wa Ammonia mu Semiconductor Viwanda

Ammonia imapereka maubwino angapo pakupanga semiconductor, makamaka m'malo otsatirawa:

3.1 Gwero la Nayitrojeni Yogwira Ntchito

Ammonia ndi gwero lothandiza komanso loyera la nayitrogeni lomwe limapereka maatomu okhazikika komanso olondola a maatomu a nayitrogeni poyika mafilimu a nitride ndi njira zopangira doping. Izi ndizofunikira pakupanga zida zazing'onoting'ono ndi nano-scale popanga semiconductor. Nthawi zambiri, ammonia imakhala yotakasuka komanso yowongoka kuposa mpweya wina wa nayitrogeni (monga mpweya wa nitrogen kapena nitrogen oxides).

3.2 Njira Yabwino Kwambiri Kuwongolera

The reactivity wa ammonia amalola izo ndendende kulamulira anachita mitengo ndi filimu makulidwe mu zosiyanasiyana zovuta njira. Posintha kuchuluka kwa mafunde a ammonia, kutentha, ndi nthawi yochitira, ndizotheka kuwongolera ndendende makulidwe, mawonekedwe, ndi mawonekedwe a makanema, motero kukhathamiritsa magwiridwe antchito a zida.

3.3 Kusunga Ndalama ndi Kusamalira Zachilengedwe

Poyerekeza ndi mpweya wina wa nayitrogeni, ammonia ndi yotsika mtengo komanso imakhala ndi mphamvu yogwiritsira ntchito nayitrogeni, zomwe zimapangitsa kuti ikhale yopindulitsa kwambiri popanga semiconductor yayikulu. Kuphatikiza apo, matekinoloje obwezeretsanso ammonia ndikugwiritsanso ntchito matekinoloje akupita patsogolo kwambiri, zomwe zimathandizira kuti chilengedwe chikhale chogwirizana.

4. Mavuto a Chitetezo ndi Zachilengedwe

Ngakhale kuti ndi yofunika kwambiri pakupanga semiconductor, ammonia ali ndi zoopsa zomwe zingatheke. Kutentha kwapakati, ammonia ndi mpweya, ndipo mu mawonekedwe ake amadzimadzi, ndi owopsa kwambiri komanso owopsa, omwe amafunikira chitetezo chokhazikika pakagwiritsidwe ntchito.

1. Kusungirako ndi Mayendedwe: Ammonia iyenera kusungidwa pa kutentha kochepa ndi kupanikizika kwakukulu, pogwiritsa ntchito zida zapadera ndi mapaipi kuti asatayike.
2. Chitetezo cha Ntchito: Ogwira ntchito m'mizere yopanga ma semiconductor ayenera kuvala zida zodzitetezera, monga magalasi, magolovesi, ndi masks a mpweya, kuti apewe kukhudzana ndi ammonia m'thupi la munthu.
3. Chithandizo cha Gasi Wowonongeka: Kugwiritsa ntchito ammonia kumatha kutulutsa mpweya woyipa, motero njira zothanirana ndi zinyalala ziyenera kukhalapo kuti zitsimikizire kuti utsi umakwaniritsa miyezo yachilengedwe.

Pamene njira zopangira ma semiconductor zikupitilirabe komanso kufunikira kwa magwiridwe antchito apamwamba kwambiri, gawo la ammonia pamakampani lipitilira kukula. Izi ndizowona makamaka pamabwalo ophatikizika a nano-scale, quantum computing chips, ndi matekinoloje apamwamba oyika. Kuonjezera apo, pamene malamulo a chilengedwe akuchulukirachulukira, kupititsa patsogolo njira zamakono zopangira zobiriwira ndi kubwezeretsanso ammonia kudzakhala chinthu chofunikira kwambiri m'tsogolomu.

Zomwe Ammonia amagwiritsira ntchito mumakampani opanga ma semiconductor amapereka maziko olimba pakupanga zamagetsi zamakono. Udindo wake pakuwongolera magwiridwe antchito, kuchepetsa ndalama zopangira, komanso kuyendetsa luso laukadaulo ndizofunikira kwambiri. Pomwe ukadaulo ukupita patsogolo, kugwiritsa ntchito kwa ammonia kupitilira kukula, kuthandizira makampani opanga ma semiconductor kuti azitha kuchita bwino komanso kusungitsa chilengedwe.

Ammonia, monga reagent yofunikira yamankhwala, imagwira ntchito yofunika kwambiri popanga semiconductor. Ndikofunikira pakuyika mafilimu a nitride, doping, ndi kuyeretsa / kukonza. Ndi kupita patsogolo kwaukadaulo waukadaulo wa semiconductor, ntchito za ammonia zikuyenera kukula, zomwe zikuthandizira kwambiri kupita patsogolo kwaukadaulo ndikuthandizira makampani opanga ma semiconductor kuti asinthe m'njira yabwino komanso yosamalira chilengedwe.