Ụlọ ọrụ Semiconductor

Anyị na-enye ndị ahịa sekit / semiconductor agbakwunyere gas pụrụ iche achọrọ maka usoro dị ka mgbasa, lithography, deposition, etching, doping, na nhicha.

Ngwaahịa akwadoro maka ụlọ ọrụ gị

Nitrogen trifluoride

Mmeghachi omume kemịkalụ dị n'etiti gas elektrọn na ihe a ga-edobe chọrọ na usoro nrụpụta etching. N'ime usoro etching nke n'ichepụta wafer, ọ dị mkpa iji gas pụrụ iche na-ewepụ akụkụ etched iji nweta nzube nke etching ntụziaka.

Silane

N'ime ụlọ ọrụ semiconductor, a na-ejikarị silane na-emepụta polysilicon dị ọcha, ihe nkiri sịlịkọn dioxide, ihe nkiri silicon nitride, oyi akwa polysilicon dịpụrụ adịpụ, wdg, a pụkwara iji ya mepụta sel anyanwụ, eriri anya na ihe mmetụta fotoelectric, wdg.

Ngwakọta gas

Dị ka gas eletrọn, nitrous oxide bụ nke a na-ejikarị na usoro ihe nkiri dielectric dị mkpa maka mmepe na mmepụta nke ngwaọrụ optoelectronic semiconductor. Ọ bụ echiche isi nke enweghị ike dochie anya gas nke na-emetụta ogo ngwaọrụ optoelectronic ozugbo.