Ụlọ ọrụ panel

Site na mmepe nke teknụzụ ngosi ngosi dị larịị, ndị ahịa chọrọ gas pụrụ iche na ihe ọmụma na ahụmịhe ọkachamara metụtara ya. Huazhong Gas na-enye ndị ahịa ihe ngosi dị iche iche dị iche iche nke ihe gas pụrụ iche, gụnyere doping, ntinye ihe nkiri, etching na nhicha ụlọ ngwa ngwa.

Ngwaahịa akwadoro maka ụlọ ọrụ gị

Silane

A na-ejikarị gas silane ọkwa eletrọnịkị na mmepụta nke TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) na ụlọ ọrụ ngosi ngosi, yana ntinye nke TFT ma ọ bụ LTPS substrates maka LCDs.

Amonia

Ejikọtara ya na silane, ọ na-etolite akwa silicon nitride nke a-Si transistors.

Ngwakọta gas

Mmepụta nke LTPS na MOS transistor abawanyela ojiji nke nitrous oxide. Site n'echiche nke oriri na ojiji na mmepụta MO, N2O karịrị NF3 ka ọ bụrụ ihe eji eletrọnịkị ihe eji eme ihe na mmepụta MO.

nitrogen trifluoride

NF3 bụ ihe eletrọnịkị nke a na-ejikarị na a-Si na mmepụta ihe ngosi LTPS na-ejikarị eme ihe maka ihicha ụlọ PECVD.