Vaj huam sib luag kev lag luam

Nrog rau txoj kev loj hlob ntawm vaj huam sib luag vaj huam sib luag tso saib technology, cov neeg muas zaub xav tau ntau tshwj xeeb gases thiab lwm yam kev txawj ntse thiab kev paub. Huazhong Gas muab cov vaj huam sib luag tiaj tus rau cov neeg siv khoom nrog ntau yam khoom siv roj tshwj xeeb, suav nrog doping, zaj duab xis tso tawm, etching thiab chamber tu txheej txheem Daim ntawv thov.

Cov khoom pom zoo rau koj qhov kev lag luam

Silane

Electronic qib silane roj yog tsuas yog siv los ntawm TFT (Thin Film Transistor) / LCD (Liquid Crystal Display) hauv kev lag luam vaj huam sib luag, thiab kev tso tawm ntawm TFT lossis LTPS substrates rau LCDs.

Ammonia

Ua ke nrog silane, nws tsim cov silicon nitride txheej ntawm a-Si transistors.

Gasmixtures

Kev tsim cov LTPS thiab MOS transistors tau nce kev siv nitrous oxide. Los ntawm qhov kev xav ntawm kev noj thiab siv hauv MO ntau lawm, N2O tau dhau NF3 los ua cov khoom siv hluav taws xob siv hauv MO ntau lawm.

nitrogen trifluoride

NF3 yog cov khoom siv hluav taws xob feem ntau siv hauv a-Si thiab LTPS cov khoom tsim tawm thiab feem ntau yog siv los ntxuav PECVD chav.