Ammonia Application hauv Semiconductor Kev Lag Luam

Ammonia (NH₃)Raws li ib qho tseem ceeb tshuaj reagent, muaj ntau daim ntawv thov nyob rau hauv ntau yam kev lag luam teb, nrog rau nws lub luag hauj lwm yog tshwj xeeb tshaj yog tseem ceeb nyob rau hauv semiconductor manufacturing. Ammonia plays lub luag haujlwm tseem ceeb hauv ntau theem ntawm cov khoom siv semiconductor, suav nrog kev tso tawm ntawm nitrides, ion implantation thiab doping, tu, thiab etching txheej txheem. Tsab ntawv xov xwm no yuav piav qhia txog kev siv ammonia hauv kev lag luam semiconductor, tshuaj xyuas nws lub luag haujlwm tseem ceeb hauv kev txhim kho cov cuab yeej ua haujlwm, txo cov nqi, thiab tsav tsheb kev lag luam tshiab, thaum tseem tham txog cov teeb meem uas nws ntsib thiab kev txhim kho yav tom ntej.

1. Cov yam ntxwv tseem ceeb thiab tshuaj lom neeg tus cwj pwm ntawm Ammonia

Ammonia yog qhov sib xyaw ua ke ntawm nitrogen thiab hydrogen, paub txog nws qhov muaj zog alkalinity thiab feem ntau pom muaj nyob rau hauv cov khoom siv nitrogen chiv. Ammonia muaj nyob rau hauv cov pa ntawm chav tsev kub tab sis tuaj yeem ua kua dej ntawm qhov kub thiab txias, ua rau nws muaj cov roj reactive heev. Hauv kev lag luam semiconductor, cov khoom siv tshuaj lom neeg ntawm ammonia ua rau nws yog ib qho tseem ceeb ntawm ntau cov txheej txheem tseem ceeb, tshwj xeeb tshaj yog nyob rau hauv tshuaj vapor deposition (CVD), ion implantation, thiab tu / etching ua hauj lwm.

Ammonia molecules tuaj yeem cuam tshuam nrog ntau yam hlau, silicon, thiab lwm yam ntaub ntawv los tsim nitrides lossis dope rau lawv. Cov kev cuam tshuam no tsis tsuas yog pab tsim cov ntaub ntawv nyias nyias nyias tab sis kuj txhim kho cov hluav taws xob, thermal, thiab cov khoom siv hluav taws xob ntawm cov khoom siv, yog li ua rau kev siv tshuab semiconductor.

2. Kev siv Ammonia hauv Semiconductor Manufacturing

Ammonia plays lub luag haujlwm tseem ceeb hauv kev tsim khoom semiconductor, tshwj xeeb hauv cov hauv qab no:

2.1 Kev tso tawm ntawm Nitride Thin Films

Nyob rau hauv niaj hnub semiconductor manufacturing, nitride nyias zaj duab xis, xws li silicon nitride (Si₃N₄), aluminium nitride (AlN), thiab titanium nitride (TiN), yog dav siv los ua cov txheej tiv thaiv, hluav taws xob cais txheej, lossis cov khoom siv hluav taws xob. Thaum lub sij hawm tso tawm ntawm cov yeeb yaj kiab nitride, ammonia yog ib qho tseem ceeb ntawm nitrogen.

Chemical vapor deposition (CVD) yog ib txoj hauv kev zoo tshaj plaws rau nitride film deposition.Ammoniareacts nrog gases xws li silane (SiH₄) ntawm qhov kub thiab txias kom decompose thiab tsim silicon nitride films. Cov tshuaj tiv thaiv yog raws li nram no:

3 SiH4+4NH3 → Si3N4+12H2

Cov txheej txheem no ua rau muaj kev tsim cov txheej txheem silicon nitride rau ntawm silicon wafer nto. Ammonia muab qhov chaw ruaj khov nitrogen thiab ua kom muaj kev tswj xyuas meej ntawm cov tshuaj tiv thaiv nrog lwm cov pa roj raws li cov xwm txheej tshwj xeeb, yog li tswj tau qhov zoo, tuab, thiab sib xws ntawm zaj duab xis.

Nitride films muaj kev ruaj ntseg zoo heev, hluav taws xob rwb thaiv tsev, thiab oxidation tsis kam, ua rau lawv tseem ceeb heev hauv kev tsim khoom semiconductor. Lawv tau siv dav hauv kev sib xyaw ua ke (ICs) raws li cov txheej txheem rwb thaiv tsev, cov txheej txheem electrode cais tawm, thiab cov qhov rais kho qhov muag hauv cov khoom siv optoelectronic.

2.2 Ion Implantation thiab Doping

Ammoniakuj tseem ua lub luag haujlwm tseem ceeb hauv cov txheej txheem doping ntawm cov khoom siv semiconductor. Doping yog cov txheej txheem tseem ceeb siv los tswj cov hluav taws xob conductivity ntawm cov ntaub ntawv hauv kev tsim cov khoom siv semiconductor. Ammonia, raws li qhov muaj txiaj ntsig zoo nitrogen, feem ntau siv nrog rau lwm cov pa roj (xws li phosphine PH₃ thiab diborane B₂H₆) los cog nitrogen rau hauv cov ntaub ntawv xws li silicon thiab gallium arsenide (GaAs) los ntawm ion implantation.

Piv txwv li, nitrogen doping tuaj yeem kho cov khoom hluav taws xob ntawm silicon los tsim N-hom lossis P-hom semiconductors. Thaum lub sij hawm ua tau zoo nitrogen doping cov txheej txheem, ammonia muab lub siab-purity nitrogen qhov chaw, kom ntseeg tau meej tswj tshaj doping concentrations. Qhov no yog qhov tseem ceeb rau kev ua haujlwm me me thiab tsim cov khoom siv ua haujlwm siab hauv kev sib koom ua ke loj heev (VLSI) kev tsim khoom.

2.3 Ntxuav thiab Etching

Kev ntxuav thiab etching txheej txheem yog qhov tseem ceeb los xyuas kom meej qhov zoo ntawm cov khoom siv hauv kev tsim khoom semiconductor. Ammonia yog siv dav hauv cov txheej txheem no, tshwj xeeb tshaj yog nyob rau hauv plasma etching thiab tshuaj ntxuav.

Hauv plasma etching, ammonia tuaj yeem ua ke nrog lwm cov pa roj (xws li chlorine, Cl₂) los pab tshem tawm cov kab mob organic, oxide txheej, thiab hlau impurities los ntawm wafer nto. Piv txwv li, ammonia reacts nrog oxygen los tsim cov pa oxygen reactive (xws li O₃ thiab O₂), uas zoo tshem tawm cov oxides saum npoo thiab ua kom ruaj khov hauv cov txheej txheem tom ntej.

Tsis tas li ntawd, ammonia tuaj yeem ua cov kuab tshuaj hauv cov txheej txheem tu, pab tshem tawm cov kab mob uas tsim los ntawm cov tshuaj lom neeg lossis cov txheej txheem tsis zoo, yog li tswj xyuas cov purity siab ntawm wafer.

3. Qhov zoo ntawm Ammonia hauv Semiconductor Kev Lag Luam

Ammonia muaj ntau qhov zoo hauv kev tsim khoom semiconductor, tshwj xeeb tshaj yog nyob rau hauv cov hauv qab no:

3.1 Siv tau Nitrogen Source

Ammonia yog ib qho zoo thiab ntshiab nitrogen qhov chaw uas muab cov khoom ruaj khov thiab meej ntawm nitrogen atoms rau kev tso tawm ntawm cov yeeb yaj kiab nitride thiab cov txheej txheem doping. Qhov no yog qhov tseem ceeb rau kev tsim cov khoom siv micro- thiab nano-scale hauv semiconductor manufacturing. Feem ntau, ammonia muaj ntau dua reactive thiab tswj tau ntau dua li lwm cov pa roj nitrogen (xws li cov pa roj nitrogen lossis nitrogen oxides).

3.2 Cov Txheej Txheem Zoo Tshaj Plaws

Lub reactivity ntawm ammonia tso cai rau nws kom meej meej tswj cov tshuaj tiv thaiv tus nqi thiab zaj duab xis thickness nyob rau hauv ib tug ntau yam ntawm complex txheej txheem. Los ntawm kev kho tus nqi ntawm ammonia, qhov kub thiab txias, thiab lub sijhawm tshuaj tiv thaiv, nws muaj peev xwm tswj tau cov thickness, uniformity, thiab cov yam ntxwv ntawm cov yeeb yaj kiab, yog li optimizing cov kev ua tau zoo ntawm cov khoom siv.

3.3 Nqi-Effectiveness thiab Environmental Friendliness

Piv nrog rau lwm cov pa roj nitrogen, ammonia kuj tsis tshua muaj nqi thiab muaj kev siv nitrogen siab, ua rau nws muaj txiaj ntsig zoo hauv kev tsim khoom loj hauv semiconductor. Tsis tas li ntawd, ammonia recycling thiab rov siv thev naus laus zis tau dhau los ua ntau dua, pab txhawb rau nws cov phooj ywg ib puag ncig.

4. Kev Nyab Xeeb thiab Ib puag ncig kev sib tw

Txawm hais tias nws lub luag haujlwm tseem ceeb hauv kev tsim khoom semiconductor, ammonia muaj peev xwm ua rau muaj kev phom sij. Nyob rau hauv chav tsev kub, ammonia yog ib tug roj, thiab nyob rau hauv nws cov kua daim ntawv, nws yog heev corrosive thiab lom, yuav tsum tau nruj me ntsis ntsuas kev nyab xeeb thaum siv.

1. Kev khaws cia thiab kev thauj mus los: Ammonia yuav tsum tau muab khaws cia rau hauv qhov kub thiab txias, siv cov ntim tshwj xeeb thiab cov kav dej kom tsis txhob muaj cov xau.
2. Kev Nyab Xeeb Kev Ua Haujlwm: Cov neeg ua haujlwm hauv cov kab hluav taws xob semiconductor yuav tsum hnav cov khoom siv tiv thaiv, xws li tsom iav, hnab looj tes, thiab lub ntsej muag roj, kom tsis txhob muaj ammonia raug rau tib neeg lub cev.
3. Kev kho cov pa khib nyiab: Kev siv cov ammonia tuaj yeem tsim cov pa phem pov tseg, yog li kev siv cov roj pov tseg kom zoo yuav tsum nyob hauv qhov chaw kom ntseeg tau tias emissions ua tau raws li ib puag ncig.

Raws li cov txheej txheem tsim khoom semiconductor txuas ntxiv mus ntxiv thiab qhov kev thov rau cov cuab yeej ua haujlwm siab dua, ammonia lub luag haujlwm hauv kev lag luam yuav loj hlob ntxiv. Qhov no yog qhov tseeb tshwj xeeb tshaj yog nyob rau hauv high-precision nano-scale integrated circuits, quantum xam chips, thiab advanced ntim technologies. Tsis tas li ntawd, raws li kev cai ib puag ncig tau nruj dua, kev txhim kho ntawm kev tsim khoom ntsuab thiab rov ua dua tshiab rau ammonia yuav dhau los ua qhov tseem ceeb hauv kev lag luam yav tom ntej.

Ammonia cov ntawv thov hauv kev lag luam semiconductor muab lub hauv paus ruaj khov rau kev txhim kho cov khoom siv hluav taws xob niaj hnub no. Nws lub luag haujlwm hauv kev txhim kho kev tsim khoom, txo cov nqi tsim khoom, thiab kev tsav tsheb thev naus laus zis yog qhov tseem ceeb. Raws li kev siv thev naus laus zis, ammonia daim ntawv thov yuav nthuav dav ntxiv, pab kev lag luam semiconductor hloov mus rau kev ua tau zoo dua qub thiab kev ruaj ntseg ib puag ncig.

AmmoniaRaws li ib qho tseem ceeb tshuaj reagent, plays lub luag hauj lwm tseem ceeb hauv semiconductor manufacturing. Nws yog ib qho tseem ceeb rau kev tso cov yeeb yaj kiab nitride, doping, thiab ntxuav / etching txheej txheem. Nrog kev nce qib ntawm cov tshuab semiconductor txuas ntxiv, ammonia cov ntawv thov tau tsim kom loj hlob, ua rau muaj txiaj ntsig zoo rau kev txhim kho thev naus laus zis thiab pab kev lag luam semiconductor hloov zuj zus mus rau kev coj ua tau zoo thiab ib puag ncig zoo.