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Nitrogen trifluoride

Hoʻomākaukau ʻia ka Nitrogen trifluoride e ka fluorination pololei o ka amonia. Hiki ke loaʻa ma ka electrolysis o ka molten ammonium bifluoride a i ʻole ma ka hui pololei ʻana o ka elemental nitrogen a me ka fluorine me ka hoʻohana ʻana i kahi hoʻokuʻu uila ma nā haʻahaʻa haʻahaʻa.

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Nitrogen trifluoride

ʻO NF₃ ke kumu kemika o ka nitrogen trifluoride. He kinoea waihoʻoluʻu, ʻala ʻole a paʻa i ka lumi wela. He mea oxidizing ikaika ia. ʻO ka trifluoride nitrogen maʻemaʻe kiʻekiʻe he etch rate maikaʻi loa a me ke koho a he mea hoʻomaʻemaʻe maikaʻi loa. Hiki iā Jinhong ke hāʻawi iā ʻoe i ke kinoea nitrogen trifluoride kiʻekiʻe e hoʻomaikaʻi i kāu kaʻina semiconductor.

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